公开(公告)号：US20160001418A1

公开(公告)日：2016-01-07

申请号：US14768112

申请日：2013-02-19

Applicant: LEAP CO., LTD

Inventor： Tokinori TERADA

IPC: B24B37/30 ,  B24B57/02

CPC classification number: B24B37/30 ,  B24B37/005 ,  B24B57/02

Abstract: A chemical mechanical polishing apparatus in which a rotating head having a polishing pad mounted thereon whose contact area with a polishing object is smaller than surface area of the polishing object is pressed against and brought into contact with a surface of the polishing object mounted face up on a table, and is rotated with the table at rest while supplying slurry onto a contact surface to polish for a predetermined time, and then the rotating head is moved within the surface of the polishing object to polish the entire surface of the polishing object sequentially, including a pressure adjustment mechanism for maintaining a pressing load on the contact surface constant during polishing.

Abstract translation: 一种化学机械抛光装置，其中安装有抛光垫的与抛光对象的接触面积小于抛光对象的表面积的旋转头被压靠并与抛光对象安装面的表面接触， 并且在将浆料供给到接触面上进行预定时间的抛光，然后将旋转头在抛光对象的表面内移动，顺序地抛光抛光对象的整个表面， 包括用于在抛光期间保持接触表面上的按压负载恒定的压力调节机构。

公开(公告)号：US20150348706A1

公开(公告)日：2015-12-03

申请号：US14438916

申请日：2012-10-30

Applicant: LEAP Co., Ltd.

Inventor： Takashi SANO ,  Tokinori TERADA

IPC: H01F41/04

CPC classification number: H01F41/041 ,  H01F17/0013 ,  Y10T29/49021

Abstract: Provided is a method for manufacturing a coil element, capable of manufacturing a coil element using a resin mold and without performing releasing and transferring, and capable of thinning the coil element. A method for manufacturing a coil element using a resin mold that is soluble in organic solvent, includes, preparing a resin mold, on a surface of which an inverted coil element pattern is engraved, forming a metal seed film on the surface of the resin mold, removing the metal seed film in an area where the inverted coil element pattern is not formed, forming a center conductive film so as to fill an area where the inverted coil element pattern is engraved by first electroplating while using the metal seed film as a base, and dissolving the resin mold to take out the center conductive film.

Abstract translation: 提供一种线圈元件的制造方法，其能够使用树脂模具制造线圈元件，并且不进行释放和转印，并且能够使线圈元件变薄。 使用可溶于有机溶剂的树脂模具制造线圈元件的方法包括：在其表面上刻有倒置线圈元件图案的表面上制备树脂模具，在树脂模具的表面上形成金属种子膜 在没有形成反转的线圈元件图案的区域中去除金属种子膜，形成中心导电膜，以便通过第一次电镀来填充倒置的线圈元件图案的区域，同时使用金属种子膜作为基底 并溶解树脂模以取出中心导电膜。

公开(公告)号：US20150302987A1

公开(公告)日：2015-10-22

申请号：US14438994

申请日：2012-10-30

Applicant: LEAP CO., LTD

Inventor： Takashi SANO ,  Tokinori TERADA

IPC: H01F41/04

CPC classification number: H01F41/04 ,  H01F41/041 ,  H01F41/046

Abstract: A method for producing a coil element includes preparing a transfer mold having an inverse coil element pattern etched thereon, forming a peel-away film and an insulating film on the surface of the transfer mold in a superimposed manner, forming a resist film in an area having no inverse coil element pattern formed therein on the insulating film, removing by etching the insulating film with the resist film as a mask, after removing the resist film, filling up an area having the inverse coil element pattern formed therein and forming a central conductive film by first electroplating so as to slightly protrude above the insulating film, peeling the central conductive film from the transfer mold, and forming a surface conductive film by second electroplating with the central conductive film as a foundation and forming a coil element comprised of the central conductive film and the surface conductive film.

Abstract translation: 一种线圈元件的制造方法，其特征在于，准备具有蚀刻在其上的反向线圈元件图案的转印模具，在所述转印模具的表面上叠加形成剥离膜和绝缘膜，在该区域中形成抗蚀剂膜 在绝缘膜上没有形成反向线圈元件图案，通过用抗蚀剂膜作为掩模蚀刻绝缘膜去除，在除去抗蚀剂膜之后，填充其中形成有反向线圈元件图案的区域并形成中心导电 通过第一次电镀以稍微突出在绝缘膜上方，从转印模上剥离中心导电膜，并以中心导电膜为基础，通过第二次电镀形成表面导电膜，形成由中心 导电膜和表面导电膜。

公开(公告)号：US20150096493A1

公开(公告)日：2015-04-09

申请号：US14048896

申请日：2013-10-08

Applicant: LEAP Co., Ltd.

Inventor： Tokinori TERADA ,  Takashi SANO

IPC: B05C5/02

CPC classification number: B05C5/02 ,  B05B7/0892 ,  B05B13/0405 ,  B05B15/55 ,  B05D1/02 ,  B05D3/0263 ,  B05D3/06

Abstract: A spray coater having a nozzle for spraying a coating liquid, a heater, a slider mounting the nozzle and the heater, and capable of moving reciprocatorily in perpendicular two directions, and a substrate holder holding a substrate so that the surface faces downward with respect to the nozzle, the spray coater forming a thick film by spraying and applying the coating liquid to the surface of the substrate by the nozzle and then heating and drying the coating liquid by the heater, wherein an application of the coating liquid is carried out sequentially by a spray area, and the nozzle and the heater are arranged in parallel so that the drying to the spray area to which the application has been performed is carried out immediately after the application, thereby forming a flat thick film even on a large-sized substrate.

Abstract translation: 一种喷涂机，其具有用于喷涂涂布液体的喷嘴，加热器，安装喷嘴和加热器的滑块，并且能够在垂直的两个方向上往复移动;以及基板保持器，其保持基板，使得表面相对于 喷嘴，喷涂机通过喷雾形成厚膜，并通过喷嘴将涂布液施加到基板的表面，然后通过加热器加热和干燥涂布液，其中涂布液的涂布依次由 喷雾区域，并且喷嘴和加热器平行布置，使得在施加之后立即对施加了喷涂区域的喷雾区域进行干燥，从而即使在大尺寸基板上也形成平坦的厚膜 。