METHOD AND APPARATUS FOR MEASURING DISTANCE
    1.
    发明公开

    公开(公告)号:US20230213326A1

    公开(公告)日:2023-07-06

    申请号:US17926314

    申请日:2021-05-13

    CPC classification number: G01B9/02004 G01B9/02091 G01B9/02009 G01N21/47

    Abstract: An interferometry apparatus comprising: a laser source operable to emit a first light beam; a beam splitter arranged to split the first light beam into an object beam and a reference beam, the object beam passing along an object beam arm and the reference beam passing along a reference beam arm; an adaptive delay line located a distance along the reference beam arm, the adaptive delay line being configured to provide, in use, one or more length-adjusted reference beams; a beam splitter arranged to recombine the object beam from the object beam arm and the length-adjusted reference beam(s) from the reference beam arm; and a photodetector operable to detect interference between the object beam and the length-adjusted reference beam(s).

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