公开(公告)号：US12270710B2

公开(公告)日：2025-04-08

申请号：US18010901

申请日：2021-07-27

Applicant: LYNRED

Inventor： Willy Ludurczak ,  Marc Guillaumont

IPC: G01J5/08 ,  G01J5/02 ,  G01J5/20

Abstract: An infrared imaging microbolometer integrating a membrane assembled in suspension above a substrate by means of holding arms attached to anchoring nails is disclosed. The membrane includes a support layer crossing the upper end of the anchoring nails. It also includes an absorber or electrode deposited on the support layer and on the anchoring nails with a pattern forming at least two electrodes. It further includes a dielectric layer deposited on the absorber or electrode and on the support layer, at least two conductive vias formed through the dielectric layer in contact with the at least two electrodes, and a thermometric or thermoresistive material arranged on a planar surface formed at the level of the upper ends of the conductive vias.

公开(公告)号：US20230236065A1

公开(公告)日：2023-07-27

申请号：US18010901

申请日：2021-07-27

Applicant: LYNRED

Inventor： Willy Ludurczak ,  Marc Guillaumont

IPC: G01J5/08 ,  G01J5/02 ,  G01J5/20

CPC classification number: G01J5/0853 ,  G01J5/024 ,  G01J5/20

Abstract: An infrared imaging microbolometer integrating a membrane assembled in suspension above a substrate by means of holding arms attached to anchoring nails is disclosed. The membrane includes a support layer crossing the upper end of the anchoring nails. It also includes an absorber or electrode deposited on the support layer and on the anchoring nails with a pattern forming at least two electrodes. It further includes a dielectric layer deposited on the absorber or electrode and on the support layer, at least two conductive vias formed through the dielectric layer in contact with the at least two electrodes, and a thermometric or thermoresistive material arranged on a planar surface formed at the level of the upper ends of the conductive vias.

公开(公告)号：US20250113735A1

公开(公告)日：2025-04-03

申请号：US18832275

申请日：2023-02-21

Applicant: LYNRED

Inventor： Marc Guillaumont ,  Willy Ludurczak

IPC: H10N15/10 ,  G01J5/00 ,  G01J5/20

Abstract: This infrared imaging microbolometer integrates a membrane mounted in suspension above a substrate by means of holding arms attached to anchor nails. The microbolometer includes a support layer extending within the membrane holding arms and electrodes arranged on the support layer and in contact with the anchor nails. Each electrode extends within a holding arm. A thermoresistive material is arranged within the membrane in electric contact with the electrodes. The microbolometer also includes at least an upper encapsulation layer for the holding arms and the thermoresistive material and a lateral encapsulation layer for the holding arms arranged in contact with the lateral edges of said holding arms, the lateral encapsulation layer being resistant to etching based on hydrofluoric acid.