公开(公告)号：US3879235A

公开(公告)日：1975-04-22

申请号：US36903973

申请日：1973-06-11

Applicant: MASSACHUSETTS INST TECHNOLOGY

Inventor： GATOS HARRY C ,  WITT AUGUST F ,  LICHTENSTEIGER MANFRED

IPC: C30B19/00 ,  C30B19/10 ,  C30B29/40 ,  H01L21/208 ,  H01L7/38

CPC classification number: C30B19/103 ,  Y10S438/936

Abstract: A method of growing epitaxial layers from a solution in a solution-substrate system. An electrically conductive solution, consisting of one or more materials to be deposited upon the substrate, is placed in contact with the substrate. The temperature of the system is established and maintained at a level at which the solution is at or near saturation. An electric current is then passed across the interface between the solution and the substrate, the direction and magnitude of the current being chosen to effect cooling at the interface only, the remainder of the system being maintained at said equilibrium temperature.

Abstract translation: 从溶液 - 衬底系统中的溶液生长外延层的方法。 将要沉积在基底上的一种或多种材料组成的导电溶液放置成与基底接触。 系统的温度建立并保持在溶液处于或接近饱和的水平。 然后电流通过溶液和基底之间的界面，电流的方向和大小被选择为仅在界面处实现冷却，系统的其余部分保持在所述平衡温度。

公开(公告)号：US3689242A

公开(公告)日：1972-09-05

申请号：US3689242D

申请日：1970-02-16

Applicant: MASSACHUSETTS INST TECHNOLOGY

Inventor： PLATAKIS NICOLAOS S ,  GATOS HARRY C ,  WITT AUGUST F

IPC: C03B5/033 ,  C03B19/02 ,  C03B19/04 ,  C03B19/09 ,  H01L45/00 ,  H01S3/17 ,  C03B29/00 ,  C03B5/16

CPC classification number: H01S3/17 ,  C03B5/0338 ,  C03B19/02 ,  C03B19/04 ,  C03B19/095 ,  C03B2201/86

Abstract: A METHOD IS DISCLOSED FOR PREPARING AN ELECTRICALLY AND OPTICALLY ACTIVE MATERIAL, EITHER VITEOUS OR POLYCRYSTALLINE, THAT PROVIDES A MATERIAL THAT IS NON-POROUS, CONTAINS NO INCLUSIONS, IS CHEMICALLY HOMOGENEOUS, AND ONE THAT CAN BE CUT OR OTHERWISE FORMED TO SOME DESIRED UNIFORM GEOMETRICAL SHAPE. THE PROCESS DISCLOSED INCLUDES SUBJECTING THE COMPONENTS OF THE MATERIAL HELD WITHIN A SEALED AMPOULE OR OTHER CLOSED CONTAINER TO AN ELEVATED TEMPERATURE IN AN INERT ATMOSPHERE OR VACUUM FOR A TIME PERIOD LONG ENOUGH FOR THE COMPONENTS TO BECOME MOLTEN AND TO REACT CHEMICALLY WITH ONE ANOTHER. HEATO IS THEN WITHDRAWN FORM THE MOLTEN MATERIAL TO LOWER THE TEMPERATURE TO A VALUE AT WHICH A THIN LAYER OF MOLTEN MATERIALS ADHERES TO THE INNER SURFACE OF THE CONTAINER. RELATIVE MOVEMENT IS EFFECTED BETWEEN THE BULK OF THE MOLTEN MATERIAL AND THE THIN LAYER OF MELT THAT ADHERED TO THE INNER SURFACE, THE THIN LAYER BEING MOVED AWAY FROM THE BULK OF THE MELT TO ALLOW SOLIDICICATION THEREBY TO FORM A SOLIDIFIED LAYER. THE SOLIDIFIED LAYER IS ALTERNATELY BROUGHT INTO CONTACT WITH THE BULK OF THE MOLTEN MATERIAL TO PICK UP A THIN LAYER OF MELT AND REMOVED FROM SUCH CONTACT TO ALLOW THE THIN LAYER TO SOLIDIFY, THERE BEING A CONTINUED WITHDRAWAL OF HEAT FROM THE REGION OCCUPIED BY THE AMPOULE IN ORDER THAT THE SOLID LAYER WILL INCREASE IN THICKNESS LAYER UPON LAYER AS ADDITIONAL MOLTEN MATERIAL SOLIFIFIES.