公开(公告)号：US3857034A

公开(公告)日：1974-12-24

申请号：US35808073

申请日：1973-05-07

Applicant: MAX PLANCK GESELLSCHAFT

Inventor： HOPPE W

IPC: H01J37/04 ,  H01J37/05 ,  H01J37/244 ,  H01J37/28 ,  H01J37/26 ,  G01N23/00

CPC classification number: H01J37/04 ,  H01J37/05 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/2441 ,  H01J2237/24465 ,  H01J2237/2449 ,  H01J2237/24507 ,  H01J2237/24585

Abstract: For dark-field imaging of the specimen, a scanning corpuscularbeam microscope is equipped with multiple annular apertures located between the beam source and the specimen on the one hand and between the specimen and the detector on the other hand. The areas of the multiple annular apertures conjointly i.e. complementarily cover the ray path. The aperture situated in front of the detector is surrounded by a wide, radiationtransmitting region. The invention affords utilizing for the generation of the image not only the rays scattered outside of the aperture cone but also a large part of the rays scattered within this cone.

Abstract translation: 对于样品的暗场成像，扫描型红外光束显微镜在一方面和另一方面在样品和检测器之间配备有多个环形孔，位于光束源和样品之间。 多个环形孔的区域联合地即互补地覆盖光线路径。 位于检测器前面的孔被宽的辐射透射区域包围。 本发明不仅可以利用散射在孔锥外的光线，而且可以利用散射在该锥体内的大部分光线。