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    Compact, configurable power supply for energizing ozone-producing cells
    1.
    发明授权
    Compact, configurable power supply for energizing ozone-producing cells 有权

    公开(公告)号：US09865426B2

    公开(公告)日：2018-01-09

    申请号：US15056330

    申请日：2016-02-29

    Applicant: MKS Instruments, Inc.

    Inventor： Ken Tran ,  Feng Tian ,  Xing Chen ,  Franklin Lee

    IPC: C01B13/11 ,  H01J37/248

    CPC classification number: H01J37/248 ,  C01B13/115 ,  C01B2201/90

    Abstract: Improvements in the supply of high-frequency electrical power to ozone-producing cells can be accomplished using the systems and techniques described herein. Application of a DC-DC converter operating at a switching frequency substantially greater than a load frequency, supports generation of a high-voltage AC for powering such cells, while allowing for reductions in component size and reductions in a quality factor of a load tuning circuit. Controllable power inverters used in obtaining one or more of the switching and load frequencies can be controlled using feedback techniques to provide stable, high-quality power to ozone-producing cells under variations in one or more of externally supplied power and load conditions. An inrush protection circuit can also be provided to selectively introduce a current-limiting resistance until an input DC bus has been sufficiently initialized as determined by measurements obtained from the DC bus. The current limiting resistance can be a positive-temperature coefficient thermistor.

    Toroidal plasma Abatement Apparatus and Method
    2.
    发明申请
    Toroidal plasma Abatement Apparatus and Method 有权
    环形等离子体消除装置及方法

    公开(公告)号：US20140262746A1

    公开(公告)日：2014-09-18

    申请号：US14212398

    申请日：2014-03-14

    Applicant: MKS Instruments, Inc.

    Inventor： Xing Chen ,  IIya Pokidov ,  Arthur Tian ,  Ken Tran ,  David Lam ,  Kevin W. Wenzel

    IPC: B01D53/76

    CPC classification number: H01J37/32449 ,  B01D53/323 ,  B01D53/76 ,  B01D2257/2064 ,  H01J37/32339 ,  H01J37/32357 ,  H01J37/32458 ,  H01J37/32651 ,  H01J37/32669 ,  H01J37/32844 ,  H01J37/32935 ,  H01J2237/3321 ,  H01J2237/334 ,  H05H1/46 ,  H05H2001/4667 ,  H05H2245/121 ,  Y02C20/30

    Abstract: An apparatus for abatement of gases is provided. The apparatus includes a toroidal plasma chamber having a plurality of inlets and an outlet, and at least one chamber wall. One or more magnetic cores are disposed relative to the toroidal plasma chamber. The plasma chamber confines a toroidal plasma. A second gas inlet is positioned on the toroidal plasma chamber between a first gas inlet and the gas outlet at a distance d from the gas outlet, such that a toroidal plasma channel volume between the first gas inlet and the second gas inlet in the is substantially filled by the inert gas, the distance d based on a desired residence time of the gas to be abated.

    Abstract translation: 提供了一种用于减少气体的装置。 该装置包括具有多个入口和出口以及至少一个室壁的环形等离子体室。 一个或多个磁芯相对于环形等离子体室设置。 等离子体室限制环形等离子体。 第二气体入口位于第一气体入口和气体出口之间的距离气体出口距离d处的环形等离子体室上，使得第一气体入口和第二气体入口之间的环形等离子体通道体积基本上 由惰性气体填充，基于要减少的气体的期望停留时间的距离d。

    COMPACT, CONFIGURABLE POWER SUPPLY FOR ENERGIZING OZONE-PRODUCING CELLS
    3.
    发明申请
    COMPACT, CONFIGURABLE POWER SUPPLY FOR ENERGIZING OZONE-PRODUCING CELLS 有权

    公开(公告)号：US20160181063A1

    公开(公告)日：2016-06-23

    申请号：US15056330

    申请日：2016-02-29

    Applicant: MKS Instruments, Inc.

    Inventor： Ken Tran ,  Feng Tian ,  Xing Chen ,  Franklin Lee

    IPC: H01J37/248 ,  C01B13/11

    CPC classification number: H01J37/248 ,  C01B13/115 ,  C01B2201/90

    Abstract: Improvements in the supply of high-frequency electrical power to ozone-producing cells can be accomplished using the systems and techniques described herein. Application of a DC-DC converter operating at a switching frequency substantially greater than a load frequency, supports generation of a high-voltage AC for powering such cells, while allowing for reductions in component size and reductions in a quality factor of a load tuning circuit. Controllable power inverters used in obtaining one or more of the switching and load frequencies can be controlled using feedback techniques to provide stable, high-quality power to ozone-producing cells under variations in one or more of externally supplied power and load conditions. An inrush protection circuit can also be provided to selectively introduce a current-limiting resistance until an input DC bus has been sufficiently initialized as determined by measurements obtained from the DC bus. The current limiting resistance can be a positive-temperature coefficient thermistor.

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