公开(公告)号：US20220359157A1

公开(公告)日：2022-11-10

申请号：US17737079

申请日：2022-05-05

Applicant: Malachite Technologies, Inc.

Inventor： Alexander David WELSH ,  Robert WEISS ,  David BROWN ,  Nicholas WHITE

IPC: H01J37/317 ,  H01J37/08

Abstract: A treatment system and process includes a ribbon beam ion source that is configured to implant ions into a product to modify a portion of the product; multiple means of controlling the temperature of the product; the means including radiative conduction, gas conduction to a heatsink by means of a gas cushion, adjustment of the ion beam density at the product, adjustment of the ion beam intensity at the product and ion beam acceleration parameters, and adjustment of the ion dose to the product b; and a product movement system configured to move the product through the treatment system past the ribbon beam ion source. The treatment system further includes a system controller configured to control at least one the following: the gas cushion system, the ribbon beam ion source, the temperature control system, the heatsink, and the product movement system.