公开(公告)号：US20040013982A1

公开(公告)日：2004-01-22

申请号：US10320869

申请日：2002-12-17

Applicant: Massachusetts Institute of Technology

Inventor： Joseph M. Jacobson ,  Colin A. Bulthaup ,  Eric J. Wilhelm ,  Brian N. Hubert

IPC: B31F001/07

CPC classification number: H01L51/0014 ,  B01J19/0046 ,  B01J2219/00382 ,  B01J2219/00585 ,  B01J2219/00596 ,  B01J2219/00605 ,  B01J2219/00608 ,  B01J2219/0061 ,  B01J2219/00621 ,  B01J2219/0063 ,  B01J2219/00635 ,  B01J2219/00659 ,  B01J2219/00722 ,  B01J2219/00725 ,  B01J2219/00731 ,  B82Y10/00 ,  B82Y40/00 ,  C40B40/06 ,  C40B40/10 ,  C40B40/12 ,  C40B60/14 ,  G03F7/0002 ,  G03F7/0017 ,  H01L21/0271 ,  H01L21/288 ,  H01L21/76802 ,  H01L21/76817 ,  H01L27/28 ,  H01L51/0004 ,  H01L51/0017 ,  H01L2251/105

Abstract: Elastomeric stamps facilitate direct patterning of electrical, biological, chemical, and mechanical materials. A thin film of material is deposited on a substrate. The deposited material, either originally present as a liquid or subsequently liquefied, is patterned by embossing at low pressure using an elastomeric stamp having a raised pattern. The patterned liquid is then cured to form a functional layer. The deposition, embossing, and curing steps may be repeated numerous times with the same or different liquids, and in two or three dimensions. The various deposited layers may, for example, have varying electrical characteristics, interacting so as to produce an integrated electronic component.

Abstract translation: 弹性邮票有助于电气，生物，化学和机械材料的直接图案化。 材料薄膜沉积在基片上。 最初以液体形式存在或随后液化的沉积材料通过使用具有凸起图案的弹性体印模在低压下进行压印来图案化。 然后将图案化的液体固化以形成功能层。 沉积，压花和固化步骤可以用相同或不同的液体，并且在两个或三个维度上重复多次。 各种沉积层可以例如具有变化的电特性，相互作用以产生集成的电子部件。

公开(公告)号：US20040035605A1

公开(公告)日：2004-02-26

申请号：US10646146

申请日：2003-08-22

Applicant: Massachusetts Institute of Technology

Inventor： Saul Griffith ,  Joseph M. Jacobson ,  Scott Manalis

IPC: H05K001/09 ,  H05K001/00 ,  G03F007/20 ,  G03F007/16 ,  G03F007/26

CPC classification number: B81C1/00373 ,  B81B2207/07 ,  B82Y30/00 ,  G03F7/00 ,  G03F7/002 ,  G03F7/0042 ,  H01L21/288 ,  H01L51/0004 ,  H05K3/102 ,  H05K3/105 ,  H05K2201/0257 ,  H05K2203/013 ,  H05K2203/107 ,  H05K2203/1131

Abstract: Electrically (and, possibly, mechanically) active patterns are applied using a colloidal suspension of nanoparticles that exhibit a desired electrical characteristic. The nanoparticles are surrounded by an insulative shells that may be removed by therefrom by application of energy (e.g., in the form of electromagnetic radiation or heat). The nanoparticle suspension is applied to a surface, forming a layer that is substantially insulative owing to the nanoparticle shells. The applied suspension is exposed to energy to remove the capping groups and fuse the particles into cohesion. If the nanoparticle suspension was deposited as a uniform film, the energy is applied in a desired pattern so that unexposed areas remain insulative while exposed areas exhibit the electrical behavior associated with the nanoparticles. If the nanoparticle suspension was deposited in a desired pattern, it may be uniformly exposed to energy. Additional layers may be applied in the same manner, one over the other, to form a multilayer device.

Abstract translation: 使用具有所需电特性的纳米粒子的胶态悬浮液来施加电（并且可能是机械）活性图案。 纳米颗粒由可通过施加能量（例如，以电磁辐射或热的形式）由其除去的绝缘壳围绕。 将纳米颗粒悬浮液施加到表面，由于纳米颗粒壳形成基本上绝缘的层。 将所施加的悬浮液暴露于能量以除去封盖组并将颗粒融合为内聚力。 如果纳米颗粒悬浮液作为均匀膜沉积，则能量以期望的图案施加，使得未曝光区域保持绝缘，而暴露的区域表现出与纳米颗粒相关的电性能。 如果纳米颗粒悬浮液以期望的图案沉积，则其可以均匀地暴露于能量。 附加的层可以以相同的方式一个一个地施加以形成多层器件。

公开(公告)号：US20040033679A1

公开(公告)日：2004-02-19

申请号：US10444176

申请日：2003-05-23

Applicant: Massachusetts Institute of Technology

Inventor： Joseph M. Jacobson ,  David Kong ,  Vikas Anant ,  Ashley Salomon ,  Saul Griffith ,  Will DelHagen ,  Vikrant Agnihotri

IPC: C30B001/00 ,  H01L021/20 ,  H01L021/36

CPC classification number: H01L21/02631 ,  B82Y10/00 ,  B82Y40/00 ,  C23C14/024 ,  C23C14/048 ,  C23C14/228 ,  C23C16/047 ,  C23C16/45525 ,  C23C16/45555 ,  H01L21/02225 ,  H01L21/02266 ,  H01L21/0228 ,  H01L21/02351 ,  H01L21/0262 ,  H01L21/02664 ,  H01L21/2633 ,  H01L21/2855 ,  H01L21/28556 ,  H01L27/30 ,  H01L51/0002 ,  Y10S977/888 ,  Y10S977/891

Abstract: A technique for forming nanostructures including a definition of a charge pattern on a substrate and introduction of charged molecular scale sized building blocks (MSSBBs) to a region proximate the charge pattern so that the MSSBBs adhere to the charge pattern to form the feature.

Abstract translation: 一种用于形成纳米结构的技术，其包括基板上的电荷图案的定义，以及将电荷分子尺度的结构单元（MSSBB）引入邻近电荷图案的区域，使得MSSBB粘附于电荷图案以形成特征。