公开(公告)号：US20040035605A1

公开(公告)日：2004-02-26

申请号：US10646146

申请日：2003-08-22

Applicant: Massachusetts Institute of Technology

Inventor： Saul Griffith ,  Joseph M. Jacobson ,  Scott Manalis

IPC: H05K001/09 ,  H05K001/00 ,  G03F007/20 ,  G03F007/16 ,  G03F007/26

CPC classification number: B81C1/00373 ,  B81B2207/07 ,  B82Y30/00 ,  G03F7/00 ,  G03F7/002 ,  G03F7/0042 ,  H01L21/288 ,  H01L51/0004 ,  H05K3/102 ,  H05K3/105 ,  H05K2201/0257 ,  H05K2203/013 ,  H05K2203/107 ,  H05K2203/1131

Abstract: Electrically (and, possibly, mechanically) active patterns are applied using a colloidal suspension of nanoparticles that exhibit a desired electrical characteristic. The nanoparticles are surrounded by an insulative shells that may be removed by therefrom by application of energy (e.g., in the form of electromagnetic radiation or heat). The nanoparticle suspension is applied to a surface, forming a layer that is substantially insulative owing to the nanoparticle shells. The applied suspension is exposed to energy to remove the capping groups and fuse the particles into cohesion. If the nanoparticle suspension was deposited as a uniform film, the energy is applied in a desired pattern so that unexposed areas remain insulative while exposed areas exhibit the electrical behavior associated with the nanoparticles. If the nanoparticle suspension was deposited in a desired pattern, it may be uniformly exposed to energy. Additional layers may be applied in the same manner, one over the other, to form a multilayer device.

Abstract translation: 使用具有所需电特性的纳米粒子的胶态悬浮液来施加电（并且可能是机械）活性图案。 纳米颗粒由可通过施加能量（例如，以电磁辐射或热的形式）由其除去的绝缘壳围绕。 将纳米颗粒悬浮液施加到表面，由于纳米颗粒壳形成基本上绝缘的层。 将所施加的悬浮液暴露于能量以除去封盖组并将颗粒融合为内聚力。 如果纳米颗粒悬浮液作为均匀膜沉积，则能量以期望的图案施加，使得未曝光区域保持绝缘，而暴露的区域表现出与纳米颗粒相关的电性能。 如果纳米颗粒悬浮液以期望的图案沉积，则其可以均匀地暴露于能量。 附加的层可以以相同的方式一个一个地施加以形成多层器件。