公开(公告)号：US20030210116A1

公开(公告)日：2003-11-13

申请号：US10156780

申请日：2002-05-08

Applicant: Motorola, Inc.

Inventor： Spencer A. Lane ,  Krishna Jonnalagadda ,  Manes Eliacin

IPC: H01H051/22

CPC classification number: B81C1/00182 ,  B81B2201/045 ,  B81B2203/0315 ,  B81C2201/0108 ,  B81C2203/0136 ,  H01H59/0009 ,  H01H2001/0073

Abstract: A meso-scale MEMS device having a movable member (51) is formed using standard printed wiring board and high density interconnect technologies and practices. In one embodiment, sacrificial material disposed about the movable member (51) is removed through openings (101, 102) as formed through a cover (91) to form a cavity (121) that retains and limits the freedom of movement of the movable member (51). The movable member can support a reflective surface (224) to thereby provide a mechanism that will support a projection display and/or image scanner (such as a bar code scanner).

Abstract translation: 使用标准印刷线路板和高密度互连技术和实践形成具有可移动部件（51）的中尺度MEMS器件。 在一个实施例中，围绕可移动构件（51）设置的牺牲材料通过通过盖（91）形成的开口（101,102）去除以形成空腔（121），其保持并限制可移动构件 （51）。 可移动构件可以支撑反射表面（224），从而提供将支撑投影显示和/或图像扫描器（例如条形码扫描器）的机构。