公开(公告)号：US20040120466A1

公开(公告)日：2004-06-24

申请号：US10662053

申请日：2003-09-12

Applicant: Moxtek, Inc.

Inventor： D. Clark Turner ,  Keith W. Decker ,  M. Christine Roberts ,  Robert N. Stillwell

IPC: G21K001/00

CPC classification number: H01J5/24 ,  G21K1/10 ,  G21K5/04 ,  H01J5/18 ,  H01J9/26 ,  H01J33/04 ,  H01J35/18 ,  H01J2235/183

Abstract: A radiation window device to transmit radiation as part of an x-ray source or detector includes a support to be subject to a substantial vacuum, and an opening configured to transmit radiation. A film is mounted directly on the support across the opening, and has a material and a thickness selected to transmit soft x-rays. An adhesive directly adheres the film to the support. A coating covers exposed portions of at least one of the evacuated or ambient sides of the film, and covers a portion of the support surrounding the film. The support, film and adhesive form a vacuum tight assembly capable of maintaining the substantial vacuum when one side is subject to the substantial vacuum. In addition, the vacuum tight assembly can withstand a temperature of greater than approximately 250 degrees Celsius.

Abstract translation: 用于透射辐射作为x射线源或检测器的一部分的辐射窗装置包括要承受实质真空的支撑件和被配置成透射辐射的开口。 薄膜直接安装在穿过开口的支撑件上，并且具有选择用于透射软X射线的材料和厚度。 粘合剂直接将膜粘附到载体上。 涂层覆盖膜的至少一个抽真空或环境侧的暴露部分，并且覆盖围绕膜的一部分载体。 支撑件，膜和粘合剂形成真空紧固组件，其能够在一侧经受基本真空时保持实质的真空。 此外，真空密封组件可以承受大于约250摄氏度的温度。