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公开(公告)号：US09764943B2
公开(公告)日：2017-09-19
申请号：US15361972
申请日：2016-11-28
Applicant: Murata Manufacturing Co., Ltd.
Inventor： Tsuyoshi Okami , Takashi Mizota , Yuki Ueya , Junya Matsuoka , Nobuaki Tsuji
IPC: B81B3/00 , G01C19/5762 , H01L41/113 , H01L41/12
CPC classification number: B81B3/0021 , B81B3/00 , B81B3/0045 , B81B2201/0228 , B81B2201/0242 , B81B2203/0154 , G01C19/5762 , H01L41/113 , H01L41/1132 , H01L41/125
Abstract: A MEMS structure includes a planar substrate, a support body coupled to the planar substrate, a fixed electrode coupled to the planar substrate and a moveable portion. The movable portion is spaced from and faces the fixed electrode. The movable electrode includes a movable weight and an intermediate frame surrounding an outer edge of the movable weight. A plurality of elastic supports connect the movable weight to the intermediate frame. The elastic supports are elastically deformable in a first direction extending parallel to the plane of the substrate such that the movable weight can move in the first direction. At least one torsion bar pivotally connects one end of the intermediate frame to the support body so as to allow the intermediate frame, and with it the movable weight, to pivot around an axis which extends parallel to the plane of the substrate and perpendicular to the first direction.
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公开(公告)号：US10287159B2
公开(公告)日：2019-05-14
申请号：US15363431
申请日：2016-11-29
Applicant: Murata Manufacturing Co., Ltd.
Inventor： Junya Matsuoka , Nobuaki Tsuji , Yuki Ueya , Tsuyoshi Okami , Takashi Mizota
Abstract: A MEMS device including a fixed member and a movable member supported via a resilient body. The MEMS device includes an impact alleviation mechanism provided at a position where the movable member and the fixed member collide during operation. The impact alleviation mechanism includes a stopper provided to either the fixed member or the movable member and that protrude to be parallel between sides of the two members with at least one side edge fixed to the respective member. Moreover, the impact alleviation mechanism includes an elongate protruding member provided on the other of the fixed member and the movable member. The elongate protruding member and the stopper are configured such that as collision force increases between the movable member and the fixed member during operation, an abutment area of an outer edge position of the elongate protruding member approaches the fixed side edge of the stopper.
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公开(公告)号：US20170073216A1
公开(公告)日：2017-03-16
申请号：US15361972
申请日：2016-11-28
Applicant: Murata Manufacturing Co., Ltd.
Inventor： Tsuyoshi Okami , Takashi Mizota , Yuki Ueya , Junya Matsuoka , Nobuaki Tsuji
IPC: B81B3/00 , G01C19/5762
CPC classification number: B81B3/0021 , B81B3/00 , B81B3/0045 , B81B2201/0228 , B81B2201/0242 , B81B2203/0154 , G01C19/5762 , H01L41/113 , H01L41/1132 , H01L41/125
Abstract: A MEMS structure includes a planar substrate, a support body coupled to the planar substrate, a fixed electrode coupled to the planar substrate and a moveable portion. The movable portion is spaced from and faces the fixed electrode. The movable electrode includes a movable weight and an intermediate frame surrounding an outer edge of the movable weight. A plurality of elastic supports connect the movable weight to the intermediate frame. The elastic supports are elastically deformable in a first direction extending parallel to the plane of the substrate such that the movable weight can move in the first direction. At least one torsion bar pivotally connects one end of the intermediate frame to the support body so as to allow the intermediate frame, and with it the movable weight, to pivot around an axis which extends parallel to the plane of the substrate and perpendicular to the first direction.
Abstract translation: MEMS结构包括平面基板，耦合到平面基板的支撑体，耦合到平面基板的固定电极和可移动部分。 可动部与固定电极间隔开并面对固定电极。 可移动电极包括可移动重物和围绕可移动重物的外边缘的中间框架。 多个弹性支撑件将可移动重物连接到中间框架。 弹性支撑件可在平行于基板的平面延伸的第一方向上弹性变形，使得可移动的重物能够沿第一方向移动。 至少一个扭力杆将中间框架的一端枢转地连接到支撑体，以便允许中间框架，并且与其一起移动的重物围绕平行于基板平面延伸的轴线并垂直于 第一个方向
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公开(公告)号：US20170073214A1
公开(公告)日：2017-03-16
申请号：US15363431
申请日：2016-11-29
Applicant: Murata Manufacturing Co., Ltd.
Inventor： Junya Matsuoka , Nobuaki Tsuji , Yuki Ueya , Tsuyoshi Okami , Takashi Mizota
IPC: B81B3/00 , G01C19/5769 , G01P15/02 , B81C1/00
CPC classification number: B81B3/0013 , B81B3/001 , B81B3/0051 , B81B2201/0235 , B81B2201/0242 , B81C1/00968 , G01C19/5769 , G01P15/02 , H01L29/84
Abstract: A MEMS device including a fixed member and a movable member supported via a resilient body. The MEMS device includes an impact alleviation mechanism provided at a position where the movable member and the fixed member collide during operation. The impact alleviation mechanism includes a stopper provided to either the fixed member or the movable member and that protrude to be parallel between sides of the two members with at least one side edge fixed to the respective member. Moreover, the impact alleviation mechanism includes an elongate protruding member provided on the other of the fixed member and the movable member. The elongate protruding member and the stopper are configured such that as collision force increases between the movable member and the fixed member during operation, an abutment area of an outer edge position of the elongate protruding member approaches the fixed side edge of the stopper.
Abstract translation: 一种MEMS装置，包括固定构件和通过弹性体支撑的可动构件。 MEMS装置包括设置在可动件和固定件在操作期间碰撞的位置处的冲击减轻机构。 冲击减轻机构包括设置在固定构件或可动构件上的止动件，并且突出地平行于两个构件的侧面之间的至少一个侧边缘固定到相应构件。 此外，冲击缓解机构包括设置在固定构件和可动构件的另一个上的细长突出构件。 细长突出构件和止动件构造成使得在操作期间随着可移动构件和固定构件之间的碰撞力增加，细长突出构件的外边缘位置的邻接区域接近止动件的固定侧边缘。
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