公开(公告)号：US11674793B2

公开(公告)日：2023-06-13

申请号：US16487349

申请日：2018-02-19

Applicant: NAMICS CORPORATION

Inventor： Qinghua Wang ,  Shien Ri ,  Toshiaki Enomoto

IPC: G01B11/16 ,  G01B11/25

CPC classification number: G01B11/16 ,  G01B11/254

Abstract: A residual thermal strain distribution measurement method of measuring a residual thermal strain distribution as residual thermal deformation in a sample generated under application of a thermal load, comprises recording images of a periodic pattern present on the surface of the sample by an image recording unit at a first temperature and a sample formation temperature at which the sample is formed, generating moire fringes based on each recorded image of the periodic pattern, calculating a phase of the moire fringes for the sample at the first temperature, calculating a phase of the moire fringes for the sample at the sample formation temperature, acquiring a phase difference of the moire fringes at the sample formation temperature with respect to the first temperature, and calculating a residual thermal strain of the sample at the first temperature with respect to the sample formation temperature based on the acquired phase difference.