公开(公告)号：US09530663B1

公开(公告)日：2016-12-27

申请号：US14746849

申请日：2015-06-23

Applicant: NANYA TECHNOLOGY CORP.

Inventor： Chiang-Lin Shih ,  Shu-Hao Hsu ,  Ya-Chih Wang

IPC: H01L21/308 ,  H01L21/027 ,  B05D1/32

CPC classification number: H01L21/3086 ,  B05D1/322 ,  H01L21/0271 ,  H01L21/0337 ,  H01L21/3088 ,  H01L21/31144 ,  H01L21/76816

Abstract: A method for forming a pattern includes steps of forming a patterned core layer on a substrate, conformally forming a spacer layer on the patterned core layer to form first concave portions, performing an etch back process to expose the patterned core layer, removing the exposed patterned core layer to form second concave portions, filling up the first concave portions and the second concave portions with a directed self-assembly material, and activating a directed self-assembly process, so that the directed self-assembly material is diffused to the perimeter of the concave portions to form a hole surrounding by the directed self-assembly material in each concave portions.

Abstract translation: 一种用于形成图案的方法包括以下步骤：在衬底上形成图案化的芯层，在图案化芯层上保形地形成间隔层以形成第一凹部，执行回蚀工艺以暴露图案化芯层，去除曝光图案 芯层以形成第二凹部，用定向自组装材料填充第一凹部和第二凹部，并且启动定向自组装工艺，使得定向自组装材料扩散到 所述凹部在每个凹部中形成由所述定向自组装材料围绕的孔。

公开(公告)号：US20160379836A1

公开(公告)日：2016-12-29

申请号：US14746849

申请日：2015-06-23

Applicant: NANYA TECHNOLOGY CORP.

Inventor： Chiang-Lin Shih ,  Shu-Hao Hsu ,  Ya-Chih Wang

IPC: H01L21/308

CPC classification number: H01L21/3086 ,  B05D1/322 ,  H01L21/0271 ,  H01L21/0337 ,  H01L21/3088 ,  H01L21/31144 ,  H01L21/76816

Abstract: A method for forming a pattern includes steps of forming a patterned core layer on a substrate, conformally forming a spacer layer on the patterned core layer to form first concave portions, performing an etch back process to expose the patterned core layer, removing the exposed patterned core layer to form second concave portions, filling up the first concave portions and the second concave portions with a directed self-assembly material, and activating a directed self-assembly process, so that the directed self-assembly material is diffused to the perimeter of the concave portions to form a hole surrounding by the directed self-assembly material in each concave portions.

Abstract translation: 一种用于形成图案的方法包括以下步骤：在衬底上形成图案化的芯层，在图案化芯层上保形地形成间隔层以形成第一凹部，执行回蚀工艺以暴露图案化芯层，去除曝光图案 芯层以形成第二凹部，用定向自组装材料填充第一凹部和第二凹部，并且启动定向自组装工艺，使得定向自组装材料扩散到 所述凹部在每个凹部中形成由所述定向自组装材料围绕的孔。