公开(公告)号：US3847689A

公开(公告)日：1974-11-12

申请号：US37442473

申请日：1973-06-28

Applicant: NASA

Inventor： FLETCHER J ,  HEINEMANN K

IPC: G01Q30/02 ,  H01J37/04 ,  C23F1/02

CPC classification number: H01J37/04 ,  H01J2237/0451 ,  H01J2237/0453

Abstract: An electron microscope including an electron source, a condenser lens having either a circular aperture for focusing a solid cone of electrons onto a specimen or an annular aperture for focusing a hollow cone of electrons onto the specimen, and an objective elns having an annular objective aperture, for focusing electrons passing through the specimen onto an image plane. The invention also entails a method of making the annular objective aperture using electron imaging, electrolytic deposition and ion etching techniques.

Abstract translation: 包括电子源的电子显微镜，具有用于将固体电子锥聚焦到样本上的圆形孔的聚光透镜或用于将中空圆锥电子聚焦到样本上的环形孔，以及具有环形物镜孔 ，用于将通过样本的电子聚焦到图像平面上。 本发明还涉及使用电子成像，电解沉积和离子蚀刻技术制造环形物镜孔的方法。