公开(公告)号：US20150345039A1

公开(公告)日：2015-12-03

申请号：US14812134

申请日：2015-07-29

Applicant: NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY

Inventor： Daneil JOSELL ,  Thomas MOFFAT

IPC: C25D3/38 ,  C25D5/04 ,  C25D21/12

CPC classification number: C25D3/38 ,  C25D3/12 ,  C25D3/46 ,  C25D3/48 ,  C25D3/54 ,  C25D3/562 ,  C25D3/58 ,  C25D3/62 ,  C25D3/64 ,  C25D5/003 ,  C25D5/04 ,  C25D7/123 ,  C25D21/10 ,  C25D21/12

Abstract: A composition includes a solvent; a metal ion disposed in the solvent; an accelerator disposed in the solvent; and a suppressor disposed in the solvent, a pH of the composition being alkaline and effective to form a superconformation comprising a damascene deposit that includes an electrochemically reduced form of the metal ion. A process for forming a superconformation includes: contacting a substrate with a composition, the composition including: a solvent; a metal ion disposed in the solvent; an accelerator disposed in the solvent; and a suppressor disposed in the solvent; controlling a pH of the composition to be alkaline; and producing a damascene deposit on the substrate to form the superconformation, the damascene deposit including an electrochemically reduced form of the metal ion.

Abstract translation: 组合物包括溶剂; 设置在溶剂中的金属离子; 设置在溶剂中的促进剂; 和设置在溶剂中的抑制剂，所述组合物的pH为碱性并且有效地形成超结构，其包含包含电化学还原形式的金属离子的镶嵌沉积物。 形成超结构的方法包括：使基底与组合物接触，所述组合物包括：溶剂; 设置在溶剂中的金属离子; 设置在溶剂中的加速剂; 和设置在溶剂中的抑制剂; 控制组合物的pH为碱性; 并在基底上产生镶嵌沉积物以形成超结构，镶嵌沉积物包括电化学还原形式的金属离子。