公开(公告)号：US20160071272A1

公开(公告)日：2016-03-10

申请号：US14930685

申请日：2015-11-03

Applicant: NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY

Inventor： JOSHUA GORDON

IPC: G06T7/00 ,  H04N13/02

CPC classification number: G06T7/0018 ,  G01B11/245 ,  G01B21/042 ,  G06T7/80 ,  G06T2207/20088 ,  G06T2207/30204

Abstract: Disclosed is a noncontact metrology probe including: a first camera including a first field of view; a second camera including a second field of view and arranged such that the second field of view overlaps the first field of view to form a prime focal volume; a third camera including a third field of view and arranged such that the third field of view overlaps the prime focal volume to form a probe focal volume; and a tracker including a tracker field of view to determine a location of the probe focal volume in the tracker field of view. Further disclosed is a process for calibrating a noncontact metrology probe, the process including: providing a noncontact metrology probe including: a first camera including a first field of view; a second camera including a second field of view; a third camera including a third field of view; and a tracker including a tracker field of view; overlapping the first field of view with the second field of view to form a prime focal volume; overlapping the prime focal volume with the third field of view to form a probe focal volume; and overlapping the a tracker field of view with the probe focal volume to calibrate the noncontact metrology probe.

Abstract translation: 公开了一种非接触式计量探头，包括：第一照相机，包括第一视场; 第二摄像机，其包括第二视场，并布置成使得第二视场与第一视野重叠以形成主焦点体积; 第三照相机，其包括第三视场，并且布置成使得第三视场与主焦点体积重叠以形成探测焦点体积; 以及跟踪器，其包括跟踪器视场以确定在跟踪器视场中探测焦点体积的位置。 还公开了一种用于校准非接触式测量探针的过程，该过程包括：提供非接触式测量探针，其包括：包括第一视野的第一照相机; 第二相机，包括第二视场; 第三相机，包括第三视场; 以及包括跟踪器视野的跟踪器; 与第二视野重叠第一视野以形成主要焦点体积; 与第三视野重叠主焦点体积以形成探针焦点体积; 并且将跟踪器视场与探测焦点体积重叠以校准非接触式测量探针。