公开(公告)号：US09577175B1

公开(公告)日：2017-02-21

申请号：US14698442

申请日：2015-04-28

Applicant: NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY

Inventor： Sae Woo Nam ,  Burm Baek ,  Francesco Marsili ,  Varun Verma

IPC: H01L39/10 ,  H01L39/02 ,  G01J1/42

CPC classification number: H01L39/02 ,  G01J1/42 ,  H01L39/10 ,  H01L39/12 ,  H01L39/24

Abstract: An apparatus includes a base layer; and a superconducting nanowire disposed on the base layer in a continuous meander pattern and including an amorphous metal-metalloid alloy such that the apparatus is configured to detect single photons, and the continuous meander pattern includes: a plurality of parallel line segments; and a plurality of curved segments, wherein adjacent parallel line segments are joined by a curved segment. A method for making an apparatus for detecting single photons includes forming a base layer; forming a superconducting layer on the base layer; patterning the superconducting layer; and forming a continuous meander pattern from the superconducting layer, the continuous meander pattern includes a plurality of parallel line segments; and a plurality of curved segments, wherein adjacent parallel line segments are joined by a curved segment; and forming a dielectric layer on the continuous meander pattern, the dielectric layer including a dielectric material that is substantially transparent to a predetermined photon wavelength, wherein the apparatus is configured to detect single photons.

Abstract translation: 一种装置包括：基层; 以及超导纳米线，其以连续的曲折图案设置在基底层上并且包括无定形金属 - 准金属合金，使得该装置被配置为检测单个光子，并且连续曲折图案包括：多个平行线段; 以及多个弯曲段，其中相邻的平行线段通过弯曲段连接。 用于制造用于检测单个光子的装置的方法包括形成基层; 在基层上形成超导层; 图案化超导层; 以及从所述超导层形成连续曲折图案，所述连续曲折图案包括多个平行线段; 以及多个弯曲段，其中相邻的平行线段通过弯曲段连接; 以及在所述连续弯曲图案上形成电介质层，所述电介质层包括对预定光子波长基本透明的介电材料，其中所述装置被配置为检测单个光子。