PHOTOREFLECTANCE DEVICE
    1.
    发明申请
    PHOTOREFLECTANCE DEVICE 有权
    光电设备

    公开(公告)号:US20150338212A1

    公开(公告)日:2015-11-26

    申请号:US14651414

    申请日:2013-12-09

    CPC classification number: G01B11/303 G01N21/1717 G01N2021/1725 G01N2201/065

    Abstract: A photoreflectance device for characterizing a rough surface includes a pump beam emitter to emit a pump beam; a probe beam emitter to emit a probe beam; a detector to detect the probe beam reflected by the surface; an integrating sphere to collect the probe beam reflected by the surface, the integrating sphere including: a first output connected to the detector, and disposed so as to receive a majority of the probe beam reflected by the surface; a second output arranged so as to receive a majority of the pump beam reflected by the surface.

    Abstract translation: 用于表征粗糙表面的光反射装置包括:泵浦光束发射器,用于发射泵浦光束; 用于发射探测光束的探测光束发射器; 用于检测由表面反射的探测光束的检测器; 用于收集由表面反射的探测光束的积分球,所述积分球包括:连接到所述检测器的第一输出,并且被设置为接收由所述表面反射的所述探测光束的大部分; 布置成接收由表面反射的泵浦光束的大部分的第二输出。

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