公开(公告)号：US20210150114A1

公开(公告)日：2021-05-20

申请号：US16622048

申请日：2018-03-27

Applicant: NIPPON CONTROL SYSTEM CORPORATION

Inventor： Dai TSUNODA ,  Nobuyasu TAKAHASHI

IPC: G06F30/398 ,  G06F30/25

Abstract: A simulation apparatus includes: a factor amount converting information storage unit in which factor amount converting information, which is information indicating correspondence between low-fidelity information and high-fidelity information, is stored; a writing pattern information storage unit in which writing pattern information is stored; an ADI simulation unit that performs an ADI simulation using one or more evaluation points, for a writing pattern indicated by the writing pattern information, thereby acquiring one or more factor amounts; a converting unit that acquires high-fidelity information, which is one or more factor amounts, corresponding to the low-fidelity information, which is one or more factor amounts, using the factor amount converting information; and an etching simulation unit that performs an etching simulation using the one or more factor amounts acquired by the converting unit.