公开(公告)号：US20210150114A1

公开(公告)日：2021-05-20

申请号：US16622048

申请日：2018-03-27

Applicant: NIPPON CONTROL SYSTEM CORPORATION

Inventor： Dai TSUNODA ,  Nobuyasu TAKAHASHI

IPC: G06F30/398 ,  G06F30/25

Abstract: A simulation apparatus includes: a factor amount converting information storage unit in which factor amount converting information, which is information indicating correspondence between low-fidelity information and high-fidelity information, is stored; a writing pattern information storage unit in which writing pattern information is stored; an ADI simulation unit that performs an ADI simulation using one or more evaluation points, for a writing pattern indicated by the writing pattern information, thereby acquiring one or more factor amounts; a converting unit that acquires high-fidelity information, which is one or more factor amounts, corresponding to the low-fidelity information, which is one or more factor amounts, using the factor amount converting information; and an etching simulation unit that performs an etching simulation using the one or more factor amounts acquired by the converting unit.

公开(公告)号：US20170125212A1

公开(公告)日：2017-05-04

申请号：US15128713

申请日：2015-02-06

Applicant: NIPPON CONTROL SYSTEM CORPORATION

Inventor： Dai TSUNODA

IPC: H01J37/302 ,  H01J37/317 ,  G03F1/20 ,  G03F7/20 ,  G03F1/84

CPC classification number: H01J37/3026 ,  G03F1/20 ,  G03F1/84 ,  G03F7/20 ,  G03F7/2037 ,  G06T7/13 ,  H01J37/3174 ,  H01J37/3175 ,  H01J2237/221 ,  H01J2237/28 ,  H01J2237/2817

Abstract: In order to solve the problem that information indicating three or more points on a contour of a figure drawn by an electron beam writer cannot be more precisely acquired, an information processing apparatus includes: an accepting unit that accepts pattern information indicating a pattern figure, and actually observed contour information acquired using an image obtained by capturing an image of a figure drawn by an electron beam writer; a transforming information acquiring unit that acquires transforming information, which is information that minimizes the sum of squares of differences between convolution values corresponding to three or more corrected contour points of a given point spread function in a region indicated by the pattern figure indicated by the pattern information and a threshold regarding the convolution values; a corrected contour point acquiring unit that acquires corrected contour point information, which is information indicating three or more corrected contour points respectively corresponding to three or more actually observed contour points, using the transforming information; and an output unit that outputs the corrected contour point information. Accordingly, it is possible to more precisely acquire information indicating three or more points on a contour of a figure drawn by an electron beam writer.