公开(公告)号：US11874606B2

公开(公告)日：2024-01-16

申请号：US18003691

申请日：2021-07-06

Applicant: NOVA LTD.

Inventor： Barak Bringoltz ,  Ofer Shlagman ,  Ran Yacoby ,  Noam Tal

IPC: G03F7/20 ,  G03F7/00

CPC classification number: G03F7/70508 ,  G03F7/70625

Abstract: A system and method are presented for controlling measurements of various sample's parameters. The system comprises a control unit configured as a computer system comprising data input and output utilities, memory, and a data processor, and being configured to communicate with a measured data provider to receive measured data indicative of measurements on the sample. The data processor is configured to perform model-based processing of the measured data utilizing at least one predetermined model, and determine, for each of one or more measurements of one or more parameters of interest of the sample, an estimated upper bound on an error value for the measurement individually, and generate output data indicative thereof.