公开(公告)号：US20180196356A1

公开(公告)日：2018-07-12

申请号：US15739250

申请日：2016-06-22

Applicant: NOVA MEASURING INSTRUMENTS LTD.

Inventor： Cornel BOZDOG ,  Aron CEPLER ,  Paul ISBESTER

IPC: G03F7/20

CPC classification number: G03F7/70633 ,  G01N21/956 ,  G01N2021/213 ,  G03F7/70466 ,  G03F7/70625 ,  H01L21/823431 ,  H01L21/845 ,  H01L22/12 ,  H01L22/20

Abstract: A method and system are presented for use in controlling a multiple patterning process of n patterning stages subsequently applied to a sample to produce a target pattern thereon. The method comprises: providing intermediate measured data indicative of an optical response of the sample after being patterned by m-th patterning stage, 1≤m