公开(公告)号：US20190339056A1

公开(公告)日：2019-11-07

申请号：US16416296

申请日：2019-05-20

Applicant: NOVA MEASURING INSTRUMENTS LTD.

Inventor： BOAZ BRILL ,  BORIS SHERMAN ,  IGOR TUROVETS

IPC: G01B11/02 ,  G03F7/20

Abstract: A method and system are presented for monitoring measurement of parameters of patterned structures based on a predetermined fitting model. The method comprises: (a) providing data indicative of measurements in at least one patterned structure; and (b) applying at least one selected verification mode to said data indicative of measurements, said at least one verification mode comprising: I) analyzing the data based on at least one predetermined factor and classifying the corresponding measurement result as acceptable or unacceptable, II) analyzing the data corresponding to the unacceptable measurement results and determining whether one or more of the measurements providing said unacceptable result are to be disregarded, or whether one or more parameters of the predetermined fitting model are to be modified.