公开(公告)号：US20170372869A1

公开(公告)日：2017-12-28

申请号：US15586858

申请日：2017-05-04

Applicant: NUFLARE TECHNOLOGY, INC.

Inventor： Kenichi KATAOKA ,  Mitsuhiro OKAZAWA ,  Yoshiro YAMANAKA

IPC: H01J37/30 ,  H01J37/317

CPC classification number: H01J37/3007 ,  H01J37/3177 ,  H01J2237/002

Abstract: A heat transfer plate according to the present embodiment includes a first heat transfer unit transferring heat generated in a member mounted on the first heat transfer unit, the heat being generated due to shaping or controlling of a beam generated by a light source in a decompressed atmosphere, a second heat transfer unit provided around the first heat transfer unit, and a plurality of third heat transfer units making the first heat transfer unit movable with respect to the second heat transfer unit, the plurality of third heat transfer units connecting the first and second heat transfer units.

公开(公告)号：US20180182593A1

公开(公告)日：2018-06-28

申请号：US15854303

申请日：2017-12-26

Applicant: NuFlare Technology, Inc.

Inventor： Hiroshi MATSUMOTO ,  Hiroshi YAMASHITA ,  Kenichi KATAOKA

IPC: H01J37/09 ,  H01J37/317

CPC classification number: H01J37/09 ,  H01J37/3177

Abstract: In one embodiment, an aperture set for a multi-beam includes a shaping aperture array in which a plurality of first openings are formed, a region including the plurality of first openings is irradiated with a charged particle beam discharged from a discharge unit, and portions of the charged particle beam pass through the plurality of respective first openings to form a multi-beam, a first shield plate in which a plurality of second openings is formed, through which a corresponding beam in the multi-beam, which passes through the plurality of first openings, passes, and a blanking aperture array in which a plurality of third openings is formed, through which a corresponding beam in the multi-beam, which passes through the plurality of first openings and the plurality of second openings, passes. The second openings are wider than the first openings.