公开(公告)号：US20230070781A1

公开(公告)日：2023-03-09

申请号：US17904383

申请日：2020-12-10

Applicant: National Institute of Advanced Industrial Science and Technology

Inventor： Yoshiyuki TERAMOTO ,  Masaki TORIMURA ,  Taizo SANO

IPC: G01J3/443 ,  G01N21/25 ,  G01N21/31

Abstract: A sample analysis system including: a droplet device that intermittently introduces a sample to a measurement region set in plasma; a light emission detection device that detects light emission in the measurement region at a detection timing, the detection timing being set at a predetermined cycle in advance; and an analysis device that analyzes the sample based on the detected light emission, the analysis device being provided with: a distribution computing unit that computes a time-spatial light intensity distribution based on the detected light emission, the time-spatial light intensity distribution being a distribution of a light intensity according to the detection timing, a position in the measurement region, and an wavelength component of the light emission; and a characteristic specifying unit that computes a feature amount that correlates with a sample characteristic indicating a property of the sample and specifies the sample characteristic based on the feature amount.