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    LASER SOURCE APPARATUS WITH MULTIPLE PLATE CONTINUUM AND MEASUREMENT SYSTEM THEREWITH
    1.
    发明申请
    LASER SOURCE APPARATUS WITH MULTIPLE PLATE CONTINUUM AND MEASUREMENT SYSTEM THEREWITH 有权

    公开(公告)号：US20220035172A1

    公开(公告)日：2022-02-03

    申请号：US17180851

    申请日：2021-02-21

    Applicant: NATIONAL TSING HUA UNIVERSITY

    Inventor： Shang-Da YANG ,  Chih-Hsuan Lu ,  Jhan-Yu Guo ,  Chao-Yang Lin

    IPC: G02B27/10 ,  G02F1/37 ,  G01J3/26

    Abstract: A laser source apparatus is for providing a beam path to generate a first laser beam and a second laser beam. The laser source apparatus includes a laser generator, at least one spectrum broadening unit and a beam splitter on the beam path. The laser generator is configured to generate an original laser beam with a pulse duration smaller than 1 ps. The spectrum broadening unit is configured in a following stage of the laser generator. The spectrum broadening unit includes a multiple plate continuum. The multiple plate continuum includes a plurality of thin plates, and the thin plates are configured along the beam path in order. The beam splitter is configured in the following stage of the laser generator to divide the original laser beam into the first laser beam and the second laser beam.

    Light source generation apparatus, light source generating method, and related defect detection system
    3.
    发明授权
    Light source generation apparatus, light source generating method, and related defect detection system 有权

    公开(公告)号：US12191621B2

    公开(公告)日：2025-01-07

    申请号：US17988276

    申请日：2022-11-16

    Applicant: NATIONAL TSING HUA UNIVERSITY

    Inventor： Andrew Hing Cheong Kung ,  Pei-Chi Huang ,  Chih-Hsuan Lu ,  Ming-Chang Chen

    IPC: H01S3/00 ,  G01N21/47 ,  G02F1/35 ,  G03F7/00 ,  H01S3/16

    Abstract: An EUV radiation light source generation apparatus includes a pump laser, at least one pulse shaping unit, a wavelength conversion unit, and a high-order harmonics generation unit. The pump laser provides a pulse laser radiation beam. Each pulse shaping unit conducts a spectrum extending operation and a phase compensation operation to the pulse laser radiation beam. The phase compensation operation makes multiple frequency components of the pulse laser radiation beam emitted by the pulse shaping unit to be substantially in phase. The wavelength conversion unit conducts a center wavelength conversion operation to the pulse laser radiation beam. The high-order harmonics generation unit receives the pulse laser radiation beam processed by the pulse shaping unit and the center wavelength conversion operation, and focuses the received pulse laser radiation beam to a high order harmonic generation medium to generate a high order harmonic radiation beam.

    COHERENT RAMAN SPECTRO-MICROSCOPY SYSTEM AND METHOD THEREOF
    4.
    发明公开
    COHERENT RAMAN SPECTRO-MICROSCOPY SYSTEM AND METHOD THEREOF 审中-公开

    公开(公告)号：US20240110875A1

    公开(公告)日：2024-04-04

    申请号：US18155754

    申请日：2023-01-18

    Applicant: NATIONAL TSING HUA UNIVERSITY

    Inventor： Shang-Da YANG ,  Chih-Hsuan Lu ,  Bo-Han Chen

    IPC: G01N21/65 ,  G01J3/44 ,  G02F1/35

    CPC classification number: G01N21/65 ,  G01J3/4412 ,  G02F1/3528 ,  G01N2021/653

    Abstract: A coherent Raman spectro-microscopy system is configured for generating a spectro-microscopic image of a sample and includes a light source, a supercontinuum spectrum generator, a color filter assembly, and a spectro-microscopic assembly. The light source is for emitting at least one pulsed laser beam. The supercontinuum spectrum generator is for broadening the bandwidth of at least one pulsed laser beam. The color filter assembly is for filtering the bandwidth of at least one pulsed laser beam according to a predetermined bandwidth and converting at least one pulsed laser beam into a coherent spectro-microscopic laser beam. The sample is disposed in the spectro-microscopic assembly, and the spectro-microscopic assembly receives the coherent spectro-microscopic laser beam so that the coherent spectro-microscopic laser beam passes through the sample to generate the spectro-microscopic image of the sample.

    Laser source apparatus with multiple plate continuum and measurement system therewith
    5.
    发明授权
    Laser source apparatus with multiple plate continuum and measurement system therewith 有权

    公开(公告)号：US11860335B2

    公开(公告)日：2024-01-02

    申请号：US17180851

    申请日：2021-02-21

    Applicant: NATIONAL TSING HUA UNIVERSITY

    Inventor： Shang-Da Yang ,  Chih-Hsuan Lu ,  Jhan-Yu Guo ,  Chao-Yang Lin

    IPC: G02B27/10 ,  G01J3/26 ,  G02F1/37

    CPC classification number: G02B27/106 ,  G01J3/26 ,  G02F1/37

    Abstract: A laser source apparatus is for providing a beam path to generate a first laser beam and a second laser beam. The laser source apparatus includes a laser generator, at least one spectrum broadening unit and a beam splitter on the beam path. The laser generator is configured to generate an original laser beam with a pulse duration smaller than 1 ps. The spectrum broadening unit is configured in a following stage of the laser generator. The spectrum broadening unit includes a multiple plate continuum. The multiple plate continuum includes a plurality of thin plates, and the thin plates are configured along the beam path in order. The beam splitter is configured in the following stage of the laser generator to divide the original laser beam into the first laser beam and the second laser beam.

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