公开(公告)号：US20230142881A1

公开(公告)日：2023-05-11

申请号：US17986280

申请日：2022-11-14

Applicant: Northeastern University

Inventor： Matteo RINALDI ,  Flavius POP ,  Bernard HERRERA

IPC: B81B3/00

CPC classification number: B81B3/0021 ,  H01L41/1138 ,  B81B2201/0271 ,  B81B2203/0127 ,  B81B2203/0315 ,  B81B2203/04 ,  B81B2207/053

Abstract: Devices for ultrasonic transmission and/or reception having a piezoelectric micromachined ultrasonic transducer (pMUT). The device employs a material such as lithium niobate as a piezoelectric layer in a membrane suspended over a cavity. Two activation electrodes on an upper surface of the membrane can activate one or more flexural modes of mechanical vibration in the membrane, the flexural modes of vibration including a displacement in a cross-sectional plane of the membrane. The device can be used individually or in an array. The device can be configured for use in a liquid medium or in biological tissue. A method of operating an ultrasonic transducer is provided. A method of fabrication of an ultrasonic transducer is provided.

公开(公告)号：US20210196989A1

公开(公告)日：2021-07-01

申请号：US17121703

申请日：2020-12-14

Applicant: Northeastern University

Inventor： Matteo RINALDI ,  Flavius POP ,  Bernard HERRERA

IPC: A61N7/02 ,  B06B1/02 ,  B06B1/06

Abstract: Implantable bio-heating and intrabody communication systems use arrays of piezoelectric micromachined ultrasonic transducers (pMUTs) to provide ultrasound-based diagnosis and treatment of medical conditions. Systems involving one or more pMUT arrays can be implanted into the body or integrating into smart ingestible pills to enable monitoring of a medical condition and/or continuous or intermittent application of hyperthermia and other treatments.