Mechanically Driven SMR-Based MEMS Magnetoelectric Antennas

    公开(公告)号:US20220308125A1

    公开(公告)日:2022-09-29

    申请号:US17656761

    申请日:2022-03-28

    Abstract: A solidly mounted resonator (SMR)-based magnetoelectric (ME) antenna comprises a substrate, a Bragg reflector disposed on the substrate, a magnetostrictive/piezoelectric ME composite element disposed on the Bragg reflector, a first electrically conductive contact and a second electrically conductive contact. The first contact is disposed between the Bragg reflector and the magnetostrictive/piezoelectric ME composite element and electrically coupled to a bottom surface of the magnetostrictive/piezoelectric ME composite element. The second contact is disposed on top of the magnetostrictive/piezoelectric ME composite element and electrically coupled to the top of the magnetostrictive/piezoelectric ME composite element. The magnetostrictive/piezoelectric ME composite element comprises a magnetorestrictive multilayer deposited on a piezoelectric layer. The magnetorestrictive multilayer produces an in-plane uniaxial magnetic anisotropy (UMA). The UMA is a twofold UMA that exhibits a symmetric radiation pattern.

    Mechanically driven SMR-BASED MEMS magnetoelectric antennas

    公开(公告)号:US12072396B2

    公开(公告)日:2024-08-27

    申请号:US17656761

    申请日:2022-03-28

    CPC classification number: G01R33/0286 H03H9/135 H03H9/175

    Abstract: A solidly mounted resonator (SMR)-based magnetoelectric (ME) antenna comprises a substrate, a Bragg reflector disposed on the substrate, a magnetostrictive/piezoelectric ME composite element disposed on the Bragg reflector, a first electrically conductive contact and a second electrically conductive contact. The first contact is disposed between the Bragg reflector and the magnetostrictive/piezoelectric ME composite element and electrically coupled to a bottom surface of the magnetostrictive/piezoelectric ME composite element. The second contact is disposed on top of the magnetostrictive/piezoelectric ME composite element and electrically coupled to the top of the magnetostrictive/piezoelectric ME composite element. The magnetostrictive/piezoelectric ME composite element comprises a magnetorestrictive multilayer deposited on a piezoelectric layer. The magnetorestrictive multilayer produces an in-plane uniaxial magnetic anisotropy (UMA). The UMA is a twofold UMA that exhibits a symmetric radiation pattern.

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