公开(公告)号：US10372845B1

公开(公告)日：2019-08-06

申请号：US14927850

申请日：2015-10-30

Applicant: Nova Measuring Instruments Ltd.

Inventor： Ruslan Berdichevsky ,  Eyal Grubner ,  Shai Segev

IPC: G01N21/95 ,  G06F17/16 ,  G06F17/50 ,  G01N21/47

Abstract: A method and system are presented for use in scatterometry analysis for a patterned structure. According to this technique, a model of a patterned structure is provided comprising a selected number of virtual segment data pieces indicative of a respective number of segments of the patterned structure along Z-axis through the structure. Each of the segment data pieces is processed for determining a matrix [Ωn] comprising Z-axis derivatives of electromagnetic fields' response of the segment to incident field based on Maxwell's equations' solution, and transforming this matrix [Ωn] into an approximated response matrix [∧n] corresponding to the electromagnetic field interaction between two different points spaced along the Z-axis. The transformation is preferably carried out by a GPU, and comprises embedding said matrix [Ωn] in a series expansion of said matrix exponential term [∧n]. Then, the approximated response matrices {[∧n]} for all the segment data pieces are multiplied for determining a general propagation matrix [∧], which is utilized to determine a scattering matrix for the patterned structure. The multiplication may also be performed by GPU.

公开(公告)号：US10970435B2

公开(公告)日：2021-04-06

申请号：US16525619

申请日：2019-07-30

Applicant: NOVA MEASURING INSTRUMENTS LTD.

Inventor： Ruslan Berdichevsky ,  Eyal Grubner ,  Shai Segev

IPC: G01N21/88 ,  G01N21/956 ,  G06F30/20

Abstract: Scatterometry analysis for a patterned structure, in which a patterned structure model is provided having a selected number of virtual segment data pieces indicative of a respective number of segments of the patterned structure along Z-axis through the structure, the segment data pieces processed for determining a matrix comprising Z-axis derivatives of electromagnetic elds' response of the segment to incident eld based on Maxwell's equations' solution, transforming this matrix into an approximated response matrix corresponding to the electromagnetic eld interaction between two different points spaced along the Z-axis, the transformation preferably carried out by a GPU, and comprises embedding the matrix in a series expansion of the matrix exponential term, the approximated response matrices for all the segment data pieces are multiplied for determining a general propagation matrix utilized to determine a scattering matrix for the patterned structure.