公开(公告)号：US20210005422A1

公开(公告)日：2021-01-07

申请号：US16899044

申请日：2020-06-11

Applicant: NuFlare Technology, Inc.

Inventor： Kazuhiro NAKASHIMA

IPC: H01J37/317 ,  H01J37/22 ,  H01J37/147

Abstract: A multi-charged particle beam image acquisition apparatus includes an image acquisition mechanism, including a stage on which a target object is capable to be disposed and a deflector for deflecting multiple charged particle beams in array arrangement, configured to acquire, in a state where a scan region width to be scanned by each of the multiple beams has been set depending on an image averaging frequency, image data of each beam by scanning the target object with deflected multiple beams while relatively shifting a stage moving direction angle and an array arranging direction angle of the multiple beams from each other, and an averaging circuit configured to average, using image data of each beam, errors of the image data by superimposing image data of the same position at the image averaging frequency.

公开(公告)号：US20170352141A1

公开(公告)日：2017-12-07

申请号：US15596724

申请日：2017-05-16

Applicant: NuFlare Technology, Inc.

Inventor： Kazuhiro NAKASHIMA

IPC: G06T7/00 ,  G06T5/20 ,  G06T11/60

CPC classification number: G06T7/001 ,  G06T5/20 ,  G06T11/60 ,  G06T2207/10061 ,  G06T2207/20032 ,  G06T2207/20216 ,  G06T2207/30164

Abstract: An inspection method according to one aspect of the present disclosure, includes: acquiring a plurality of first acquisition images of a first die having a predetermined pattern; acquiring a plurality of second acquisition images of a second die having the predetermined pattern; acquiring a plurality of third acquisition images of a third die having the predetermined pattern; producing a first average image with the first acquisition images; producing a second average image with the second acquisition images: producing a third average image with the third acquisition images; producing a first comparative image with the first average image and the second average image; producing a second comparative image with the second average image and the third average image; producing a third comparative image with the first average image and the third average image; producing a reference image with the first acquisition images, the second acquisition images, and the third acquisition images; performing first comparison between the first comparative image and the reference image; performing second comparison between the second comparative image and the reference image; performing third comparison between the third comparative image and the reference image; determining, when a first defect is detected in the first comparison and the third comparison, that the first die has the first defect; determining, when a second defect is detected in the first comparison and the second comparison, that the second die has the second defect; and determining, when a third defect is detected in the second comparison and the third comparison, that the third die has the third defect.

公开(公告)号：US20190066286A1

公开(公告)日：2019-02-28

申请号：US16104191

申请日：2018-08-17

Applicant: NuFlare Technology, Inc.

Inventor： Masataka SHIRATSUCHI ,  Riki OGAWA ,  Hideaki HASHIMOTO ,  Kazuhiro NAKASHIMA ,  Ryoichi HIRANO ,  Hideo TSUCHIYA ,  Chosaku NODA

IPC: G06T7/00 ,  G06T5/00

Abstract: According to one aspect of the present invention, a pattern inspection apparatus includes: a first sub-pixel interpolation processing circuitry configured to calculate a pixel value of a reference image corresponding to a position of each pixel of the inspection target image by performing an interpolation process using at least one pixel value of the reference image for each shift amount while variably and relatively shifting the inspection target image and the reference image by the unit of a sub-pixel using the reference image corresponding to the inspection target image; and an SSD calculation processing circuitry configured to calculate a sum of squared difference between each pixel value of the inspection target image and a corresponding pixel value of the reference image subjected to a filter process for the each shift amount.

公开(公告)号：US20180306733A1

公开(公告)日：2018-10-25

申请号：US15926004

申请日：2018-03-20

Applicant: NuFlare Technology, Inc.

Inventor： Kazuhiro NAKASHIMA

IPC: G01N21/956 ,  G01N21/88

CPC classification number: G01N21/95607 ,  G01N21/8806 ,  G01N2021/95676

Abstract: Provided is an inspection method including: irradiating a sample to be inspected with illuminating light; acquiring a first image of the sample to be inspected, with an auto focuser using the illuminating light reflected from the sample to be inspected; storing autofocus function coordinates acquired with the auto focuser in the acquiring the first image; calculating a two-dimensional polynomial approximation of the autofocus function coordinates; and controlling focusing in acquiring a second image of the sample to be inspected, with the two-dimensional polynomial approximation.

公开(公告)号：US20160070971A1

公开(公告)日：2016-03-10

申请号：US14837347

申请日：2015-08-27

Applicant: NuFlare Technology, Inc.

Inventor： Kazuhiro NAKASHIMA

IPC: G06K9/46 ,  G06K9/52 ,  G06K9/62 ,  G06T7/00

CPC classification number: G06T7/74 ,  G01R31/00 ,  G06T7/001 ,  G06T2207/10056 ,  G06T2207/30148 ,  H01L22/12

Abstract: In an inspection method, an inspection region of a sample is divided into a plurality of stripe regions, and is divided into a plurality of groups so that a plurality of continuously arranged stripe regions constitutes one group. An optical image of a graphic pattern arranged in a stripe region of one of the groups is acquired while moving a stage in a longitudinal direction of the stripe region. The stage is then moved in a lateral direction of the stripe region. An optical image of a graphic pattern arranged in a stripe region of a group different from one of the groups in which the optical image is acquired, and in a stripe region not continuous to the stripe region whose optical image is acquired immediately before the movement in the lateral direction, is acquired while moving the stage in the longitudinal direction of the stripe region.

Abstract translation: 在检查方法中，样本的检查区域被划分为多个条带区域，并且被划分为多个组，使得多个连续排列的条带区域构成一个组。 在沿条带区域的纵向方向移动台阶的同时获取布置在组中的一个组的条带区域中的图形图案的光学图像。 然后将舞台沿条纹区域的横向方向移动。 布置在与获取光学图像的组中的一个不同的组的条带区域中的图形图案的光学图像，以及在与在光学图像被移动之前立即获取光学图像的条带区域不连续的条带区域 沿着条带区域的纵向方向移动舞台时获取横向。