公开(公告)号：US11293101B2

公开(公告)日：2022-04-05

申请号：US16357837

申请日：2019-03-19

Applicant: OKINAWA INSTITUTE OF SCIENCE AND TECHNOLOGY SCHOOL CORPORATION

Inventor： Yabing Qi ,  Luis Ono ,  Shenghao Wang

IPC: C23C14/08 ,  C23C14/24 ,  C23C16/52 ,  C23C14/06 ,  C23C14/12 ,  C23C14/50 ,  C23C14/54 ,  C23C16/40 ,  C23C16/455 ,  C23C16/46 ,  H01L31/0256 ,  H01L51/00 ,  H01L51/42 ,  C07F7/22 ,  C07F7/24

Abstract: A method for fabricating a perovskite film includes the steps of: placing a substrate on a substrate stage in a chamber, the substrate stage configured to rotate around its central axis at a rotation speed; depositing first source materials on the substrate from a first set of evaporation units, each coupled to the side section or the bottom section of the chamber; depositing second source materials on the substrate from a second set of evaporation units coupled to the bottom section, wherein the chamber includes a shield defining two or more zones having respective horizontal cross-sectional areas, which are open and facing the substrate, designated for the two or more evaporation units in the second set. The perovskite film includes multiple unit layers each being formed by one rotation of the substrate stage, and having composition and thickness thereof controlled by adjusting evaporation rates, rotation speed and horizontal cross-sectional areas.

公开(公告)号：US20190211453A1

公开(公告)日：2019-07-11

申请号：US16357837

申请日：2019-03-19

Applicant: OKINAWA INSTITUTE OF SCIENCE AND TECHNOLOGY SCHOOL CORPORATION

Inventor： Yabing Qi ,  Luis Ono ,  Shenghao Wang

IPC: C23C16/52 ,  C23C14/54 ,  C23C16/46 ,  C23C14/06 ,  C23C14/12 ,  C23C14/24 ,  C23C14/50 ,  C23C16/455 ,  C23C16/40 ,  H01L31/0256

Abstract: A system and method for fabricating a perovskite film is provided, the system including a substrate stage configured to rotate around its central axis at a rotation speed, a first set of evaporation units, each coupled to the side section or the bottom section of the chamber, a second set of evaporation units coupled to the bottom section, and a shield defining two or more zones having respective horizontal cross-sectional areas, which are open and facing the substrate, designated for the two or more evaporation units in the second set. The resultant perovskite film includes multiple unit layers, wherein each unit layer is formed by one rotation of the substrate stage, and the composition and thickness of the unit layer are controlled by adjusting at least the evaporation rates, the rotation speed and the horizontal cross-sectional areas.