公开(公告)号：US20150324968A1

公开(公告)日：2015-11-12

申请号：US14272745

申请日：2014-05-08

Applicant: ORBOTECH LTD.

Inventor： Uri GOLD ,  Ram ORON

IPC: G06T7/00

CPC classification number: G06T7/004 ,  G01N21/88 ,  G03F7/00 ,  G03F7/70383 ,  G03F7/70516 ,  G06T7/0004 ,  G06T7/521 ,  G06T7/80 ,  G06T2207/30164

Abstract: Optical apparatus includes a mount, which holds a workpiece. An array of optical heads project respective patterns of radiation onto the workpiece. A calibration assembly captures images of the respective patterns. A motion assembly, on which the calibration assembly is mounted, transports the calibration assembly among a plurality of different positions between the array of the optical heads and the mount so as to intercept and image, at each of the different positions, a respective pattern projected by a different one of the optical heads. A processor processes the images captured by the calibration assembly at the different positions so as to monitor operation of the apparatus.

Abstract translation: 光学装置包括保持工件的安装件。 光学头阵列将相应的辐射图案投影到工件上。 校准组件捕获相应图案的图像。 校准组件安装在其上的运动组件在光学头阵列与安装座之间的多个不同位置之间传送校准组件，以便在每个不同位置处截取和成像投影的相应图案 通过不同的一个光学头。 处理器处理由校准组件在不同位置拍摄的图像，以便监视设备的操作。

公开(公告)号：US20140160757A1

公开(公告)日：2014-06-12

申请号：US13712580

申请日：2012-12-12

Applicant: ORBOTECH LTD.

Inventor： Ben-Zion LAVI ,  Ram ORON ,  Uri GOLD ,  Ilia LUTSKER ,  Mordechay SILBERBERG

IPC: F21V29/00

CPC classification number: H01L33/64 ,  F21V29/70 ,  H05K1/0207 ,  H05K1/0306 ,  H05K2201/10106

Abstract: An LED-based high power uniform light engine including an array of LEDs having a common anode and a fill factor which exceeds 0.85, the common anode having heat spreading functionality and an active heat sink which is thermally connected to the common anode.

Abstract translation: 一种基于LED的高功率均匀光引擎，其包括具有共同阳极的LED阵列和超过0.85的填充因子，具有热扩散功能的公共阳极和与公共阳极热连接的有源散热器。