公开(公告)号：US20150285734A1

公开(公告)日：2015-10-08

申请号：US14246790

申请日：2014-04-07

Applicant: ORBOTECH LTD.

Inventor： Ronen LEVY ,  Ofer SAPHIER ,  Ariel DANAN

IPC: G01N21/21

CPC classification number: G01N21/8806 ,  G01N2201/06113 ,  G01N2201/0697

Abstract: An optical inspection system including a first multiplicity of cameras operative to image a second multiplicity of regions on an object, a third multiplicity of illumination sources and at least one illumination manager operative to combine illumination from the third multiplicity of illumination sources and thereafter to direct illumination therefrom to the second multiplicity of regions, the at least one illumination manager including a beam distributor receiving a composite input beam of a multiplicity of non-mutually coherent, spatially concentrated laser pulses and directing a multiplicity of composite output beams of a plurality of the non-mutually coherent, spatially concentrated laser pulses to a corresponding plurality of spatially distinct locations corresponding to the second multiplicity of regions.

Abstract translation: 一种光学检查系统，包括第一多个摄像机，其操作以对物体上的第二多个区域进行成像，第三多个照明源和至少一个照明管理器，其操作以组合来自第三多个照明源的照明，然后直接照射 所述至少一个照明管理器包括光束分布器，其接收多个非相互相干的空间集中的激光脉冲的复合输入光束，并且引导多个非相干空间集中的激光脉冲的多个复合输出光束， - 相当一致的，空间上集中的激光脉冲到对应于第二多个区域的对应的多个空间不同的位置。