Apparatus and methods for the inspection of objects

    公开(公告)号:US20040126005A1

    公开(公告)日:2004-07-01

    申请号:US10706440

    申请日:2003-11-12

    Applicant: ORBOTECH LTD.

    Abstract: This invention discloses a system and method for inspecting objects, the method including creating a reference image for a representative object, the reference image comprising an at least partially vectorized first representation of boundaries within the image, acquiring an image of an object under inspection comprising a second representation of boundaries within the image, and comparing the second representation of boundaries to said at least partially vectorized first representation of boundaries, thereby to identify defects. A method and system for image processing in a software environment, the method including providing to a software based image processor a combination of user defined regions and defect triggers received from a hardware processor, and inspecting each of the user defined regions and regions surrounding hardware defect triggers each with a dynamically chosen set of inspection algorithms is also disclosed.

    Apparatus and methods for the inspection of objects
    2.
    发明申请
    Apparatus and methods for the inspection of objects 失效
    用于检查物体的装置和方法

    公开(公告)号:US20040120571A1

    公开(公告)日:2004-06-24

    申请号:US10706489

    申请日:2003-11-12

    Applicant: ORBOTECH LTD.

    Abstract: This invention discloses a system and method for inspecting objects, the method including creating a reference image for a representative object, the reference image comprising an at least partially vectorized first representation of boundaries within the image, acquiring an image of an object under inspection comprising a second representation of boundaries within the image, and comparing the second representation of boundaries to said at least partially vectorized first representation of boundaries, thereby to identify defects. A method and system for image processing in a software environment, the method including providing to a software based image processor a combination of user defined regions and defect triggers received from a hardware processor, and inspecting each of the user defined regions and regions surrounding hardware defect triggers each with a dynamically chosen set of inspection algorithms is also disclosed.

    Abstract translation: 本发明公开了一种用于检查对象的系统和方法,所述方法包括为代表对象创建参考图像,所述参考图像包括图像内的边界的至少部分矢量化的第一表示,获取被检查对象的图像,包括 在图像内的边界的第二表示,以及将边界的第二表示与所述至少部分向量化的边界的第一表示进行比较,从而识别缺陷。 一种用于在软件环境中进行图像处理的方法和系统,所述方法包括向基于软件的图像处理器提供从硬件处理器接收的用户定义区域和缺陷触发器的组合,以及检查每个用户定义的区域和围绕硬件缺陷的区域 触发各动作选择的一组检测算法也被公开。

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