公开(公告)号：US20230259070A1

公开(公告)日：2023-08-17

申请号：US18013112

申请日：2021-06-17

Applicant: Orbotech Ltd.

Inventor： Yigal KATZIR ,  Boaz ROSENBERG ,  Nir TURKO

IPC: G03H1/04 ,  G01B9/02 ,  G01B9/02055

CPC classification number: G03H1/0443 ,  G01B9/02047 ,  G01B9/02078

Abstract: A method for reconstructing a digital hologram of a surface having at least one three- dimensional feature thereon, including acquiring a digital hologram of the surface, reconstructing a wavefront based on the digital hologram, generating a phase map of at least a portion of the surface based on the wavefront, the phase map including phase ambiguities, obtaining at least one additional image of the surface, obtaining height data relating to the three-dimensional feature from the at least one additional image of the surface, the height data being obtained with a first precision, resolving the phase ambiguities based on the height data and deriving a height of the at least one three- dimensional feature based on the phase map following the resolving of the phase ambiguities therein, the height being derived with a second precision more precise than the first precision.