公开(公告)号：US20240429106A1

公开(公告)日：2024-12-26

申请号：US18338838

申请日：2023-06-21

Applicant: Orbotech Ltd.

Inventor： Arie Glazer ,  Victor Rybalkin ,  Tali Hurvits

IPC: H01L21/66 ,  G01R31/26 ,  H01L27/12

Abstract: The Voltage Image Optical System (VIOS) includes a substrate, an electro-optic modulator, a light source, a detector, and a processor. The electro-optic modulator is separated from the substrate by a buffer material and includes a mirrored pellicle, a transparent electrode, and a polymer dispersed liquid crystal (PDLC) sensor material disposed between the transparent electrode and the mirrored pellicle. The buffer material is disposed between the mirrored pellicle and the substrate. The light source is configured to illuminate the PDLC sensor material during application of a voltage to the transparent electrode, and the detector is configured to detect intensity of light reflected by the mirrored pellicle. The processor is configured to determine whether a pixel electrode on the substrate is a defective pixel electrode or a functioning pixel electrode based on the intensity of the light transmitted by the PDLC and reflected by the mirrored pellicle.