公开(公告)号：US10119821B2

公开(公告)日：2018-11-06

申请号：US15058374

申请日：2016-03-02

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Tsuyoshi Fujii ,  Kensaku Yamamoto

IPC: G01C19/56 ,  G01C19/574 ,  G01C19/5719 ,  G01C19/5607 ,  H01L41/113

Abstract: A sensor includes a sensor element, defined in an XY plane, including a first member, a second member having a first portion extending from the first member in a positive Y axis direction, a second portion extending from the first portion in a positive X axis direction and a third portion extending from the second portion in a negative Y axis direction, and a third member having a first section and a second section having a rectangular shape in a top view respectively. The first portion, the second portion and the third portion extend along a periphery of the first section in the top view respectively. The second section is connected to the third portion and extends from the first section in a positive Y axis direction. A length of the second member is larger than a length of the third member in a positive X axis direction.

公开(公告)号：US20160195395A1

公开(公告)日：2016-07-07

申请号：US15058374

申请日：2016-03-02

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Tsuyoshi Fujii ,  Kensaku Yamamoto

IPC: G01C19/5719

CPC classification number: G01C19/5719 ,  G01C19/56 ,  G01C19/5607 ,  G01C19/574 ,  H01L41/1132

Abstract: A sensor includes a sensor element, defined in an XY plane, including a first member, a second member having a first portion extending from the first member in a positive Y axis direction, a second portion extending from the first portion in a positive X axis direction and a third portion extending from the second portion in a negative Y axis direction, and a third member having a first section and a second section having a rectangular shape in a top view respectively. The first portion, the second portion and the third portion extend along a periphery of the first section in the top view respectively. The second section is connected to the third portion and extends from the first section in a positive Y axis direction. A length of the second member is larger than a length of the third member in a positive X axis direction.

Abstract translation: 传感器包括限定在XY平面中的传感器元件，包括第一构件，第二构件，具有从第一构件在正Y轴方向上延伸的第一部分，第二部分从正X轴从第一部分延伸 方向和从第二部分延伸到负Y轴方向的第三部分，以及分别具有第一部分和第二部分的顶部视图中的矩形形状的第三部件。 第一部分，第二部分和第三部分分别在顶视图中沿着第一部分的周边延伸。 第二部分连接到第三部分并且沿着Y轴方向从第一部分延伸。 第二构件的长度比正X轴方向上的第三构件的长度大。

公开(公告)号：US20170176186A1

公开(公告)日：2017-06-22

申请号：US15454220

申请日：2017-03-09

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Shigehiro Yoshiuchi ,  Satoshi Ohuchi ,  Tsuyoshi Fujii ,  Kensaku Yamamoto ,  Hideo Ohkoshi

IPC: G01C19/5769 ,  B81B7/00

CPC classification number: G01C19/5769 ,  B81B7/0048 ,  B81B2201/0242 ,  B81B2201/025 ,  B81B2203/0118 ,  B81B2203/0315 ,  B81B2207/07 ,  B81C1/0023 ,  B81C1/00238 ,  G01P15/0802 ,  H01L24/32 ,  H01L41/1132 ,  H01L2224/32145 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/73265 ,  H01L2225/06506 ,  H01L2924/01014 ,  H01L2924/01079 ,  H01L2924/14 ,  H01L2924/00014

Abstract: An inertial force sensor that can suppress fluctuation of detection sensitivity even if an external stress is applied to the inertial force sensor. Angular velocity sensor (1), that is, an inertial force sensor includes ceramic substrate (6), lower lid (4) adhering to ceramic substrate (6) with adhesives (11a and 11b) (first adhesives), and sensor element (2) adhering to lower lid (4) with adhesives (10a and 10b) (second adhesives). The elastic moduli of adhesives (11a and 11b) are smaller than those of adhesives (10a and 10b).

公开(公告)号：US20150192602A1

公开(公告)日：2015-07-09

申请号：US14660353

申请日：2015-03-17

Applicant: Panasonic Intellectual Property Management Co., Ltd.

Inventor： Shigehiro Yoshiuchi ,  Satoshi Ohuchi ,  Tsuyoshi Fujii ,  Kensaku Yamamoto ,  Hideo Ohkoshi

IPC: G01P15/08

CPC classification number: G01C19/5769 ,  B81B7/0048 ,  B81B2201/0242 ,  B81B2201/025 ,  B81B2203/0118 ,  B81B2203/0315 ,  B81B2207/07 ,  B81C1/0023 ,  B81C1/00238 ,  G01P15/0802 ,  H01L24/32 ,  H01L41/1132 ,  H01L2224/32145 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/73265 ,  H01L2225/06506 ,  H01L2924/01014 ,  H01L2924/01079 ,  H01L2924/14 ,  H01L2924/00014

Abstract: An inertial force sensor that can suppress fluctuation of detection sensitivity even if an external stress is applied to the inertial force sensor. Angular velocity sensor (1), that is, an inertial force sensor includes ceramic substrate (6), lower lid (4) adhering to ceramic substrate (6) with adhesives (11a and 11b) (first adhesives), and sensor element (2) adhering to lower lid (4) with adhesives (10a and 10b) (second adhesives). The elastic moduli of adhesives (11a and 11b) are smaller than those of adhesives (10a and 10b).

Abstract translation: 即使向惯性力传感器施加外部应力也能够抑制检测灵敏度的波动的惯性力传感器。 角速度传感器（1）即惯性力传感器包括陶瓷基板（6），粘合剂（11a和11b）（第一粘合剂）和传感器元件（2）附着在陶瓷基板（6）上的下盖 ）用粘合剂（10a和10b）（第二粘合剂）粘附到下盖（4）上。 粘合剂（11a和11b）的弹性模量小于粘合剂（10a和10b）的弹性模量。