公开(公告)号：US20220208579A1

公开(公告)日：2022-06-30

申请号：US17136314

申请日：2020-12-29

Applicant: Photon Dynamics, Inc.

Inventor： Neil Dang Nguyen ,  Kent Nguyen ,  Kiran Jitendra ,  Inho Chae ,  Gordon Yue

IPC: H01L21/67 ,  H01L21/677 ,  G01N21/88 ,  G01R31/26

Abstract: A system for glass substrate inspection, such as flat patterned media, includes an air table that holds the glass substrate. The air table includes chucklets that emit gas as air bearings. A camera is disposed over the air table and moves in a direction across a width of a top surface of the glass substrate. An assembly includes a gripper and a probe bar configured to be transported under the camera. The gripper is configured to grip a bottom surface of the glass substrate opposite the top surface. The probe bar delivers driving signals to the glass substrate through a plurality of probe pins.

公开(公告)号：US10962567B2

公开(公告)日：2021-03-30

申请号：US15359578

申请日：2016-11-22

Applicant: Photon Dynamics, Inc.

Inventor： Gordon Yue ,  Lloyd Russell Jones ,  Neil Dang Nguyen ,  Kiran Jitendra ,  Kent Nguyen ,  Steven Aochi

IPC: G01R1/073 ,  G01R1/067 ,  G02F1/13 ,  G09G3/00 ,  G02F1/1345

Abstract: A probe system for facilitating inspection of a device under test comprising a plurality of panels, the probe system incorporating: a configurable universal probe bar comprising a plurality of probe blocks, the plurality of probe blocks comprising a plurality of probe pins positioned to simultaneously electrically engage a plurality of cell contact pads of the plurality of panels of the device under test to deliver a plurality of electrical test signals; and an alignment system configured to achieve an alignment of the plurality of probe pins with the plurality of the cell contact pads of the plurality of panels of the device under test.

公开(公告)号：US20240112935A1

公开(公告)日：2024-04-04

申请号：US18531653

申请日：2023-12-06

Applicant: Photon Dynamics, Inc.

Inventor： Neil Dang Nguyen ,  Kent Nguyen ,  Kiran Jitendra ,  Inho Chae ,  Gordon Yue

IPC: H01L21/67 ,  G01N21/88 ,  G01R31/26 ,  H01L21/677

CPC classification number: H01L21/67288 ,  G01N21/8851 ,  G01R31/2601 ,  H01L21/67784

Abstract: A system for glass substrate inspection, such as flat patterned media, includes an air table that holds the glass substrate. The air table includes chucks that emit gas as air bearings. A camera is disposed over the air table and moves in a direction across a width of a top surface of the glass substrate. An assembly includes a gripper and a probe bar configured to be transported under the camera. The gripper is configured to grip a bottom surface of the glass substrate opposite the top surface. The probe bar delivers driving signals to the glass substrate through a plurality of probe pins.

公开(公告)号：US20170146567A1

公开(公告)日：2017-05-25

申请号：US15359578

申请日：2016-11-22

Applicant: Photon Dynamics, Inc.

Inventor： Gordon Yue ,  Lloyd Russell Jones ,  Neil Dang Nguyen ,  Kiran Jitendra ,  Kent Nguyen ,  Steven Aochi

IPC: G01R1/067 ,  G09G3/00 ,  G01R1/073

CPC classification number: G01R1/06794 ,  G01R1/06722 ,  G01R1/07307 ,  G01R1/07364 ,  G02F1/1309 ,  G02F1/13458 ,  G09G3/006

Abstract: A probe system for facilitating inspection of a device under test comprising a plurality of panels, the probe system incorporating: a configurable universal probe bar comprising a plurality of probe blocks, the plurality of probe blocks comprising a plurality of probe pins positioned to simultaneously electrically engage a plurality of cell contact pads of the plurality of panels of the device under test to deliver a plurality of electrical test signals; and an alignment system configured to achieve an alignment of the plurality of probe pins with the plurality of the cell contact pads of the plurality of panels of the device under test.