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公开(公告)号:US10852192B2
公开(公告)日:2020-12-01
申请号:US16183727
申请日:2018-11-07
Applicant: PixArt Imaging Incorporation
Inventor: Chih-Ming Sun , Ming-Han Tsai
Abstract: The present invention discloses a wearable device with combined sensing capabilities, which includes a wearable assembly and at least one multi-function sensor module. The wearable assembly is suitable to be worn on a part of a user's body. The wearable assembly includes at least one light-transmissible window. The multi-function sensor module is located inside the wearable assembly, for performing an image sensing function and an infrared temperature sensing function. The multi-function sensor module includes an image sensor module for sensing a physical or a biological feature of an object through the light-transmissible window by way of image sensing; and an infrared temperature sensor module for sensing temperature through the light-transmissible window by way of infrared temperature sensing.
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公开(公告)号:US10283612B2
公开(公告)日:2019-05-07
申请号:US15911113
申请日:2018-03-03
Applicant: PixArt Imaging Incorporation
Inventor: Chih-Ming Sun , Hsin-Hui Hsu , Ming-Han Tsai
IPC: H01L21/308 , H01L21/762 , H01L29/51 , H01L29/40 , H01L29/423
Abstract: The present invention discloses a manufacturing method for a semiconductor device. The manufacturing method includes: providing a substrate; forming a semiconductor stacked structure on the substrate; forming at least apart of a stacked cap layer on the semiconductor stacked structure, wherein the part of the stacked cap layer includes a nitride layer; removing a part of the nitride layer; forming the rest part of the stacked cap layer; forming a protection layer on the stacked cap layer, and etching the protection layer to form an opening, wherein the nitride layer is not exposed by the opening; and introducing an etchant material into the opening to etch the substrate. The present invention also provides a semiconductor device made by the method.
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公开(公告)号:US20210041298A1
公开(公告)日:2021-02-11
申请号:US17067718
申请日:2020-10-11
Applicant: PixArt Imaging Incorporation
Inventor: Chih-Ming Sun , Ming-Han Tsai
Abstract: The present invention discloses a wearable device with combined sensing capabilities, which includes a wearable assembly and at least one multi-function sensor module. The wearable assembly is suitable to be worn on apart of a user's body. The wearable assembly includes at least one light-transmissible window. The multi-function sensor module is located inside the wearable assembly, for performing an image sensing function and an infrared temperature sensing function. The multi-function sensor module includes an image sensor module for sensing a physical or a biological feature of an object through the light-transmissible window by way of image sensing; and an infrared temperature sensor module for sensing temperature through the light-transmissible window by way of infrared temperature sensing.
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公开(公告)号:US10418458B2
公开(公告)日:2019-09-17
申请号:US16357375
申请日:2019-03-19
Applicant: PixArt Imaging Incorporation
Inventor: Chih-Ming Sun , Hsin-Hui Hsu , Ming-Han Tsai
IPC: H01L29/51 , H01L29/423 , H01L29/40 , H01L21/308 , H01L21/762
Abstract: The present invention discloses a manufacturing method for a semiconductor device. The manufacturing method includes: providing a substrate; forming a semiconductor stacked structure on the substrate; forming at least apart of a stacked cap layer on the semiconductor stacked structure, wherein the part of the stacked cap layer includes a nitride layer; removing a part of the nitride layer; forming the rest part of the stacked cap layer; forming a protection layer on the stacked cap layer, and etching the protection layer to form an opening, wherein the nitride layer is not exposed by the opening; and introducing an etchant material into the opening to etch the substrate. The present invention also provides a semiconductor device made by the method.
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公开(公告)号:US11885689B2
公开(公告)日:2024-01-30
申请号:US17067718
申请日:2020-10-11
Applicant: PixArt Imaging Incorporation
Inventor: Chih-Ming Sun , Ming-Han Tsai
IPC: G01J5/02 , B81B7/02 , B81B7/00 , G01J5/14 , G01J5/04 , G01J5/00 , H04N23/56 , A61B5/01 , A61B5/00 , G01K13/20 , A61B5/024 , A61B5/1455
CPC classification number: G01J5/0265 , A61B5/01 , A61B5/681 , B81B7/0025 , B81B7/0061 , B81B7/02 , G01J5/0025 , G01J5/027 , G01J5/04 , G01J5/046 , G01J5/14 , G01K13/20 , H04N23/56 , A61B5/02416 , A61B5/14551 , A61B2562/0233 , B81B2201/0214 , B81B2201/0235 , B81B2201/0242 , B81B2201/0278 , H01L2224/48091 , H01L2924/16151 , H01L2924/16153 , H01L2924/16235 , H01L2224/48091 , H01L2924/00014
Abstract: The present invention discloses a wearable device with combined sensing capabilities, which includes a wearable assembly and at least one multi-function sensor module. The wearable assembly is suitable to be worn on apart of a user's body. The wearable assembly includes at least one light-transmissible window. The multi-function sensor module is located inside the wearable assembly, for performing an image sensing function and an infrared temperature sensing function. The multi-function sensor module includes an image sensor module for sensing a physical or a biological feature of an object through the light-transmissible window by way of image sensing; and an infrared temperature sensor module for sensing temperature through the light-transmissible window by way of infrared temperature sensing.
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公开(公告)号:US20190214477A1
公开(公告)日:2019-07-11
申请号:US16357375
申请日:2019-03-19
Applicant: PixArt Imaging Incorporation
Inventor: Chih-Ming Sun , Hsin-Hui Hsu , Ming-Han Tsai
IPC: H01L29/51 , H01L29/423 , H01L21/762 , H01L29/40 , H01L21/308
CPC classification number: H01L29/518 , H01L21/3086 , H01L21/76224 , H01L29/401 , H01L29/42324
Abstract: The present invention discloses a manufacturing method for a semiconductor device. The manufacturing method includes: providing a substrate; forming a semiconductor stacked structure on the substrate; forming at least apart of a stacked cap layer on the semiconductor stacked structure, wherein the part of the stacked cap layer includes a nitride layer; removing a part of the nitride layer; forming the rest part of the stacked cap layer; forming a protection layer on the stacked cap layer, and etching the protection layer to form an opening, wherein the nitride layer is not exposed by the opening; and introducing an etchant material into the opening to etch the substrate. The present invention also provides a semiconductor device made by the method.
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公开(公告)号:US20160365423A1
公开(公告)日:2016-12-15
申请号:US15068573
申请日:2016-03-12
Applicant: PixArt Imaging Incorporation
Inventor: Chih-Ming Sun , Hsin-Hui Hsu , Ming-Han Tsai
IPC: H01L29/51 , H01L21/308 , H01L21/311 , H01L29/40 , H01L21/762
CPC classification number: H01L29/518 , H01L21/3086 , H01L21/76224 , H01L29/401 , H01L29/42324
Abstract: The present invention discloses a manufacturing method for a semiconductor device. The manufacturing method includes: providing a substrate; forming a semiconductor stacked structure on the substrate; forming at least apart of a stacked cap layer on the semiconductor stacked structure, wherein the part of the stacked cap layer includes a nitride layer; removing a part of the nitride layer; forming the rest part of the stacked cap layer; forming a protection layer on the stacked cap layer, and etching the protection layer to form an opening, wherein the nitride layer is not exposed by the opening; and introducing an etchant material into the opening to etch the substrate. The present invention also provides a semiconductor device made by the method.
Abstract translation: 本发明公开了一种半导体器件的制造方法。 该制造方法包括:提供基板; 在所述基板上形成半导体堆叠结构; 在所述半导体堆叠结构上形成层叠的盖层的至少一部分,其中所述堆叠的盖层的所述部分包括氮化物层; 去除所述氮化物层的一部分; 形成堆叠盖层的其余部分; 在所述堆叠的盖层上形成保护层,并且蚀刻所述保护层以形成开口,其中所述氮化物层不被所述开口暴露; 并将蚀刻剂材料引入到所述开口中以蚀刻所述衬底。 本发明还提供了一种通过该方法制造的半导体器件。
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公开(公告)号:US20190113390A1
公开(公告)日:2019-04-18
申请号:US16183727
申请日:2018-11-07
Applicant: PixArt Imaging Incorporation
Inventor: Chih-Ming Sun , Ming-Han Tsai
Abstract: The present invention discloses a wearable device with combined sensing capabilities, which includes a wearable assembly and at least one multi-function sensor module. The wearable assembly is suitable to be worn on a part of a user's body. The wearable assembly includes at least one light-transmissible window. The multi-function sensor module is located inside the wearable assembly, for performing an image sensing function and an infrared temperature sensing function. The multi-function sensor module includes an image sensor module for sensing a physical or a biological feature of an object through the light-transmissible window by way of image sensing; and an infrared temperature sensor module for sensing temperature through the light-transmissible window by way of infrared temperature sensing.
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公开(公告)号:US20180190786A1
公开(公告)日:2018-07-05
申请号:US15911113
申请日:2018-03-03
Applicant: PixArt Imaging Incorporation
Inventor: Chih-Ming Sun , Hsin-Hui Hsu , Ming-Han Tsai
IPC: H01L29/51 , H01L29/40 , H01L21/308 , H01L21/762
CPC classification number: H01L29/518 , H01L21/3086 , H01L21/76224 , H01L29/401 , H01L29/42324
Abstract: The present invention discloses a manufacturing method for a semiconductor device. The manufacturing method includes: providing a substrate; forming a semiconductor stacked structure on the substrate; forming at least apart of a stacked cap layer on the semiconductor stacked structure, wherein the part of the stacked cap layer includes a nitride layer; removing a part of the nitride layer; forming the rest part of the stacked cap layer; forming a protection layer on the stacked cap layer, and etching the protection layer to form an opening, wherein the nitride layer is not exposed by the opening; and introducing an etchant material into the opening to etch the substrate. The present invention also provides a semiconductor device made by the method.
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公开(公告)号:US09941379B2
公开(公告)日:2018-04-10
申请号:US15068573
申请日:2016-03-12
Applicant: PixArt Imaging Incorporation
Inventor: Chih-Ming Sun , Hsin-Hui Hsu , Ming-Han Tsai
IPC: H01L21/308 , H01L21/311 , H01L21/762 , H01L29/51 , H01L29/40
CPC classification number: H01L29/518 , H01L21/3086 , H01L21/76224 , H01L29/401 , H01L29/42324
Abstract: The present invention discloses a manufacturing method for a semiconductor device. The manufacturing method includes: providing a substrate; forming a semiconductor stacked structure on the substrate; forming at least apart of a stacked cap layer on the semiconductor stacked structure, wherein the part of the stacked cap layer includes a nitride layer; removing a part of the nitride layer; forming the rest part of the stacked cap layer; forming a protection layer on the stacked cap layer, and etching the protection layer to form an opening, wherein the nitride layer is not exposed by the opening; and introducing an etchant material into the opening to etch the substrate. The present invention also provides a semiconductor device made by the method.
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