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公开(公告)号：US20240111148A1
公开(公告)日：2024-04-04
申请号：US18537100
申请日：2023-12-12
Applicant: Preciseley Microtechnology Corp.
Inventor： Tiansheng ZHOU
CPC classification number: G02B26/085 , B81C1/00603 , G02B26/0841 , B81B2201/033 , B81B2201/042 , B81B2203/0136
Abstract: A micromirror which comprises a mirror pivotally attached to a mount by a first pivoting structure that permits pivotal movement of the mirror relative to the mount about a first axis; a first comb drive which has a first position fixed relative to the mirror and second portion fixed relative to the mount. The first comb drive being for actuating the mirror about the first axis. A weight connected to the mirror, and the weight and mirror being on opposite sides of a fulcrum of the first pivoting structure. The first axis is non-parallel to a longitudinal axis extending through the weight and the mirror.
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公开(公告)号：US20230126293A1
公开(公告)日：2023-04-27
申请号：US18145302
申请日：2022-12-22
Applicant: Preciseley Microtechnology Corp.
Inventor： Tiansheng ZHOU
Abstract: A micromirror which comprises a mirror pivotally attached to a mount by a first pivoting structure that permits pivotal movement of the mirror relative to the mount about a first axis; a first comb drive which has a first position fixed relative to the mirror and second portion fixed relative to the mount. The first comb drive being for actuating the mirror about the first axis. A weight connected to the mirror, and the weight and mirror being on opposite sides of a fulcrum of the first pivoting structure. The first axis is non-parallel to a longitudinal axis extending through the weight and the mirror.
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