MONOLITHIC-INTEGRATED BULK ACOUSTIC WAVE (BAW) RESONATOR

    公开(公告)号:US20240322791A1

    公开(公告)日:2024-09-26

    申请号:US18189779

    申请日:2023-03-24

    CPC classification number: H03H9/173 H03H3/02 H03H2003/021

    Abstract: Disclosed are techniques for an integrated circuit (IC) that includes one or more transistors on a substrate and an interconnection structure on the one or more transistors. The interconnection structure includes a semiconductor structure embedded in the interconnection structure. In an aspect, the semiconductor structure includes a cavity structure, a piezoelectric layer over the cavity structure, an upper conductive structure on the piezoelectric layer, and a first contact structure on the upper conductive structure. In an aspect, the cavity structure includes a bottom that is a part of a first etch stop layer over a substrate, a top that is a part of a second etch stop layer over the first etch stop layer, one or more sidewalls connecting the bottom and the top of the cavity structure, and a cavity between the top and the bottom of the cavity structure and surrounded by the one or more sidewalls.

    SIGNAL POWER SPLITTER/COMBINER WITH RESISTANCE AND IMPEDANCE TRANSFORMER LOADING

    公开(公告)号:US20230030569A1

    公开(公告)日:2023-02-02

    申请号:US17392005

    申请日:2021-08-02

    Abstract: An aspect relates to a signal power splitter/combiner including a first signal port; a first resistor; a first impedance transformer coupled in series with the first resistor between the first signal port and a first intermediate node; a second impedance transformer coupled between the first intermediate node and a second signal port; a third impedance transformer coupled between the first intermediate node and a third signal port; and a second resistor coupled between the second and third signal ports. The signal power splitter/combiner may further include a fourth impedance transformer coupled between the second impedance transformer and the second signal port, a fifth impedance transformer coupled between the third impedance transformer and the third signal port; and a third resistor coupled between a third intermediate nod.

    BACKSIDE POWER DISTRIBUTION NETWORK (PDN) PROCESSING

    公开(公告)号:US20220028758A1

    公开(公告)日:2022-01-27

    申请号:US16937426

    申请日:2020-07-23

    Abstract: Disclosed is a semiconductor die with a through substrate via (TSV) structure having improved electrical characteristics suitable for backside power distribution networks (PDNs), and a method for making same. According to some aspects, a semiconductor die includes a substrate having a front side and a back side and includes a TSV extending from the back side of the substrate towards the front side of the substrate. The TSV includes a first portion extending from the back side of the substrate towards the front side of the substrate and having a first cross sectional area and a second portion extending from the first portion towards the front side of the substrate and having a second cross sectional area smaller than the first cross sectional area. A conductor is disposed within the TSV. According to some aspects, the first portion of the TSV is trench structure.

    MIM CAPACITOR WITH ADJUSTABLE CAPACITANCE VIA ELECTRONIC FUSES

    公开(公告)号:US20210296170A1

    公开(公告)日:2021-09-23

    申请号:US16820961

    申请日:2020-03-17

    Abstract: Certain aspects of the present disclosure are generally directed to techniques and apparatus for adjusting capacitance in one or more metal-insulator-metal (MIM) capacitors in an effort to reduce capacitance variation between semiconductor devices and improve yield during fabrication. One example method for fabricating a semiconductor device generally includes measuring a capacitance value of a MIM capacitor of the semiconductor device, determining the measured capacitance value of the MIM capacitor is above a target capacitance value for the MIM capacitor, and selectively rupturing a set of connections in the MIM capacitor based on the measured capacitance value. Selectively rupturing the set of connections in the MIM capacitor may reduce the capacitance value of the MIM capacitor to a value approximately that of the target capacitance value.

    WIDEBAND FILTER WITH RESONATORS AND INDUCTORS

    公开(公告)号:US20210257989A1

    公开(公告)日:2021-08-19

    申请号:US17245901

    申请日:2021-04-30

    Abstract: Aspects of the disclosure are directed to a bandpass filter including a first, second, third and fourth resonators, wherein the second and third resonators are in parallel, wherein the first resonator includes a first and second terminals, wherein the second resonator includes a second resonator top terminal and a second resonator bottom terminal, wherein the third resonator includes a third resonator top terminal and a third resonator bottom terminal, wherein the fourth resonator includes a third terminal and a fourth terminal; wherein the first terminal is coupled to the second resonator top terminal, wherein the second terminal is coupled to the third resonator top terminal, wherein the third terminal is coupled to the third resonator bottom terminal, wherein the fourth terminal is coupled to the second resonator bottom terminal; a first inductor coupled to the first and third terminals; and a second inductor coupled to the second and fourth terminals.

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