MONOLITHIC-INTEGRATED BULK ACOUSTIC WAVE (BAW) RESONATOR

    公开(公告)号:US20240322791A1

    公开(公告)日:2024-09-26

    申请号:US18189779

    申请日:2023-03-24

    CPC classification number: H03H9/173 H03H3/02 H03H2003/021

    Abstract: Disclosed are techniques for an integrated circuit (IC) that includes one or more transistors on a substrate and an interconnection structure on the one or more transistors. The interconnection structure includes a semiconductor structure embedded in the interconnection structure. In an aspect, the semiconductor structure includes a cavity structure, a piezoelectric layer over the cavity structure, an upper conductive structure on the piezoelectric layer, and a first contact structure on the upper conductive structure. In an aspect, the cavity structure includes a bottom that is a part of a first etch stop layer over a substrate, a top that is a part of a second etch stop layer over the first etch stop layer, one or more sidewalls connecting the bottom and the top of the cavity structure, and a cavity between the top and the bottom of the cavity structure and surrounded by the one or more sidewalls.

    SECURE ANTI-FUSE ONE TIME PROGRAMMABLE BIT CELL DESIGN

    公开(公告)号:US20240321370A1

    公开(公告)日:2024-09-26

    申请号:US18187993

    申请日:2023-03-22

    CPC classification number: G11C17/165 H01L23/5252 H10B20/25

    Abstract: Disclosed are secure anti-fuse one-time programmable (OTP) bit cells. In an aspect, an OTP bit cell includes a P− well comprising an N+ region and a P+ region, a first contact electrically coupled to the N+ region of the P− well, a second contact electrically coupled to the P+ region of the P− well, an insulating layer disposed over a portion of the N+ region, a portion of the P− well, and a portion of the P+ region, a gate structure disposed over the insulating layer, and a third contact electrically coupled to the gate structure. In an unprogrammed mode, the insulating layer creates a high resistance between the third contact and the second contact, and in a programmed mode, a rupture in the insulating layer creates a low resistance between the third contact and the second contact.

    DIELECTRIC FILM BASED ONE-TIME PROGRAMMABLE (OTP) MEMORY CELL

    公开(公告)号:US20240321369A1

    公开(公告)日:2024-09-26

    申请号:US18186734

    申请日:2023-03-20

    CPC classification number: G11C17/165 G11C17/18 H01L23/5256 H10B20/25

    Abstract: Disclosed are techniques for a semiconductor structure. In an aspect, a semiconductor structure includes a conductive element on an isolation structure, a dielectric film, a first contact structure, wherein at least a portion of the dielectric film is disposed between the conductive element and the first contact structure, and a second contact structure disposed on and electrically coupled with the conductive element. The dielectric film is configured as a resistive element with the first contact structure and the second contact structure being terminals of the resistive element after a dielectric breakdown has occurred within the portion of the dielectric film. Also, the dielectric film is configured as an insulator of a capacitive element with the first contact structure and the second contact structure being terminals of the capacitive element in a case that no dielectric breakdown has occurred within the portion of the dielectric film.

    MOISTURE SENSOR HAVING INTEGRATED HEATING ELEMENT

    公开(公告)号:US20240319127A1

    公开(公告)日:2024-09-26

    申请号:US18189494

    申请日:2023-03-24

    CPC classification number: G01N27/225 G01N27/228

    Abstract: In an aspect, a device includes: a first patterned metal layer; a first dielectric layer disposed over the first patterned metal layer; a second patterned metal layer disposed over the first dielectric layer, wherein the first patterned metal layer, the first dielectric layer, and the second patterned metal layer form a first capacitor; a second moisture-sensitive dielectric layer disposed over the second patterned metal layer; and a third patterned metal layer disposed over the second moisture-sensitive dielectric layer, wherein the third patterned metal layer, the second moisture-sensitive dielectric layer, and the second patterned metal layer form a second capacitor that is moisture-sensitive, and the first patterned metal layer is further configured as a heating element to assist in removing moisture from the second moisture-sensitive dielectric layer of the second capacitor in response to provision of an electrical power to the first patterned metal layer.

    ONE-TIME PROGRAMMABLE DEVICE WITH ANTIFUSE

    公开(公告)号:US20210351192A1

    公开(公告)日:2021-11-11

    申请号:US16869829

    申请日:2020-05-08

    Abstract: Certain aspects of the present disclosure generally relate to a one-time programmable (OTP) device including an antifuse device. The antifuse device generally includes a first active region, a second active region, a channel region disposed between the first active region and the second active region, a gate region disposed above the channel region, and a first set of lightly doped drain (LDD) extension regions extending partially across the channel region from the first active region and the second active region and extending into a portion of the channel region underneath the gate region. The first set of LDD extension regions have a same dopant type as the gate region and at least one of the first active region or the second active region.

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