公开(公告)号：US09096419B2

公开(公告)日：2015-08-04

申请号：US13632959

申请日：2012-10-01

Applicant: QUALCOMM MEMS Technologies, Inc.

Inventor： Edward Keat Leem Chan ,  Isak Clark Reines ,  Bing Wen ,  Chong Uk Lee

IPC: G06T1/00 ,  B81B3/00 ,  H01F7/18

CPC classification number: B81B3/0051 ,  B81B3/007 ,  B81B2201/047 ,  B81B2203/0109 ,  B81B2203/0163 ,  H01F2007/1822 ,  Y10T29/49155

Abstract: This disclosure provides systems, methods, and apparatus for an electromechanical systems (EMS) device with one or more protrusions connected to a surface of the EMS device. In one aspect, the EMS device includes a substrate, a stationary electrode over the substrate, and a movable electrode over the stationary electrode. The movable electrode is configured to move to three or more positions across a gap by electrostatic actuation between the movable electrode and the stationary electrode. When the protrusions contact any surface of the EMS device at one of the positions across the gap, the protrusions change the stiffness of the EMS device. At least one of the surfaces in contact with the one or more protrusions is non-rigid. In some implementations, the protrusions have a height greater than about 20 nm.

Abstract translation: 本公开提供了一种具有连接到EMS装置的表面的一个或多个突起的机电系统（EMS）装置的系统，方法和装置。 一方面，EMS装置包括基板，位于基板上的固定电极以及固定电极上方的可动电极。 可移动电极构造成通过可动电极和固定电极之间的静电驱动而跨越间隙移动到三个或更多个位置。 当突起物在横跨间隙的位置之一接触EMS装置的任何表面时，突起改变EMS装置的刚度。 与一个或多个突起接触的至少一个表面是非刚性的。 在一些实施方案中，突起的高度大于约20nm。

公开(公告)号：US20140092110A1

公开(公告)日：2014-04-03

申请号：US13632959

申请日：2012-10-01

Applicant: QUALCOMM MEMS TECHNOLOGIES, INC.

Inventor： Edward Keat Leem Chan ,  Isak Clark Reines ,  Bing Wen ,  Chong Uk Lee

IPC: G02B26/00 ,  G06T1/60 ,  H05K3/10

CPC classification number: B81B3/0051 ,  B81B3/007 ,  B81B2201/047 ,  B81B2203/0109 ,  B81B2203/0163 ,  H01F2007/1822 ,  Y10T29/49155

Abstract: This disclosure provides systems, methods, and apparatus for an electromechanical systems (EMS) device with one or more protrusions connected to a surface of the EMS device. In one aspect, the EMS device includes a substrate, a stationary electrode over the substrate, and a movable electrode over the stationary electrode. The movable electrode is configured to move to three or more positions across a gap by electrostatic actuation between the movable electrode and the stationary electrode. When the protrusions contact any surface of the EMS device at one of the positions across the gap, the protrusions change the stiffness of the EMS device. At least one of the surfaces in contact with the one or more protrusions is non-rigid. In some implementations, the protrusions have a height greater than about 20 nm.

Abstract translation: 本公开提供了一种具有连接到EMS装置的表面的一个或多个突起的机电系统（EMS）装置的系统，方法和装置。 一方面，EMS装置包括基板，位于基板上的固定电极以及固定电极上方的可动电极。 可移动电极构造成通过可动电极和固定电极之间的静电驱动而跨越间隙移动到三个或更多个位置。 当突起物在横跨间隙的位置之一接触EMS装置的任何表面时，突起改变EMS装置的刚度。 与一个或多个突起接触的至少一个表面是非刚性的。 在一些实施方案中，突起的高度大于约20nm。

公开(公告)号：US20160149516A1

公开(公告)日：2016-05-26

申请号：US14554612

申请日：2014-11-26

Applicant: QUALCOMM MEMS Technologies, Inc.

Inventor： John Hyunchul Hong ,  Tallis Young Chang ,  Edward Keat Leem Chan ,  Isak Clark Reines ,  Bing Wen ,  Yaoling Pan

IPC: H02N1/00 ,  G09G3/20

CPC classification number: B81B3/0086 ,  B81B3/0072 ,  B81B2201/047 ,  B81B2203/0109 ,  B81B2203/0163

Abstract: This disclosure provides systems, methods and apparatus for forming electromechanical devices having a gap between a movable layer and a fixed layer. In one aspect, the movable layer may be supported by hinge structures, and the design of the hinge structure may be controlled to provide a desired amount of flexure, providing electromechanical devices with a desired gap height. The height of the gap may be larger than the thickness a sacrificial material used during the fabrication process. In another aspect, the design of the hinge structure may be used to control threshold voltages of electromechanical devices.

Abstract translation: 本公开提供了用于形成在可移动层和固定层之间具有间隙的机电装置的系统，方法和装置。 在一个方面，可移动层可以由铰链结构支撑，并且可以控制铰链结构的设计以提供所需量的挠曲，为机电装置提供期望的间隙高度。 间隙的高度可以大于在制造过程中使用的牺牲材料的厚度。 在另一方面，铰链结构的设计可用于控制机电装置的阈值电压。