公开(公告)号：US20180134554A1

公开(公告)日：2018-05-17

申请号：US15564395

申请日：2016-04-06

Applicant: RASIRC, Inc.

Inventor： Daniel ALVAREZ, JR. ,  Christopher RAMOS ,  Jeffrey J. SPIEGELMAN

IPC: C01B15/013 ,  C01B15/017 ,  B01J39/18 ,  B01J47/02 ,  B01J47/12 ,  B01J49/53 ,  B01J3/00 ,  C08L81/08

CPC classification number: C01B15/0135 ,  B01J3/006 ,  B01J39/18 ,  B01J39/20 ,  B01J47/02 ,  B01J47/12 ,  B01J49/53 ,  C01B15/017 ,  C08L81/08

Abstract: Compositions, methods, devices, and systems for purifying a source liquid from a replenishment stock solution that includes stabilizing agents, such as metal ions, prior to vaporization. Certain embodiments effect the purification with a solid perfluoronated ionomer, such as a perfluoronated ionomer membrane. Advantageously, source liquids purified in this manner provide feed stocks for production of ultra-pure gaseous reagents. As well, performance characteristics of membrane-based vaporizers relying on transport processes are improved.

公开(公告)号：US20160051928A1

公开(公告)日：2016-02-25

申请号：US14781615

申请日：2014-04-03

Applicant: RASIRC, INC.

Inventor： Jeffrey J. SPIEGELMAN ,  Russell J. HOLMES ,  Bhuvnesh ARYA ,  Edward HEINLEIN ,  Daniel ALVAREZ, JR.

IPC: B01D53/22 ,  H05B3/00 ,  F22B1/28

CPC classification number: B01D53/228 ,  A61L2/00 ,  A61L9/00 ,  F22B1/284 ,  H05B3/009

Abstract: A method and chemical delivery system are provided. The method includes providing a concentrated aqueous hydrogen peroxide solution in a boiler having a head space, boiling the concentrated aqueous hydrogen peroxide solution to produce a dilute vapor comprising hydrogen peroxide within the head space of the boiler, and adding a dilute aqueous hydrogen peroxide solution to the concentrated aqueous hydrogen peroxide solution within the boiler to maintain the concentration of the aqueous hydrogen peroxide solution in the boiler. The method further includes delivering the dilute vapor comprising hydrogen peroxide to a critical process or application. The chemical delivery system includes a concentrated aqueous hydrogen peroxide solution, a boiler having a head space configured for boiling the concentrated aqueous hydrogen peroxide solution and producing a dilute vapor comprising hydrogen peroxide within the head space, and a manifold configured for adding a dilute aqueous hydrogen peroxide solution to the concentrated aqueous hydrogen peroxide solution within the boiler to maintain the concentration of the aqueous hydrogen peroxide solution in the boiler, wherein the manifold is further configured to deliver the dilute vapor comprising hydrogen peroxide to a critical process or application.

Abstract translation: 提供了一种方法和化学物质输送系统。 该方法包括在具有顶部空间的锅炉中提供浓缩的过氧化氢水溶液，煮沸浓缩的过氧化氢水溶液以在锅炉的顶部空间内产生包含过氧化氢的稀释蒸气，并将稀的过氧化氢水溶液加入到 锅炉内浓缩的过氧化氢水溶液，保持锅炉中过氧化氢水溶液的浓度。 该方法还包括将包含过氧化氢的稀释蒸气输送至关键过程或应用。 化学递送系统包括浓缩的过氧化氢水溶液，具有顶部空间的锅炉，其被配置用于沸腾浓缩的过氧化氢水溶液，并在顶部空间内产生包含过氧化氢的稀释蒸气，以及歧管，其构造成用于将稀氢氧化合物 过氧化物溶液，以保持锅炉内的过氧化氢水溶液的浓度，其中歧管进一步构造成将包含过氧化氢的稀释蒸气输送至关键的过程或应用。