公开(公告)号：US10067058B1

公开(公告)日：2018-09-04

申请号：US15912919

申请日：2018-03-06

Applicant: RENISHAW PLC

Inventor： Robert James Brown ,  Ruth Alice Lawson

IPC: G01N21/00 ,  G01N21/63 ,  G01N21/65 ,  G02B7/09 ,  G02B7/34 ,  G01N21/64

Abstract: An auto-focus system suitable for a spectroscopy system uses the same illumination beam as the exciting light for spectroscopy. This is focused to a spot or line focus on the sample. An image of the spot or line focus is directed to a detector via one or more pupils located eccentrically of the optical axis, so that the focus condition is indicated by displacement of the image on the detector. The spot or line focus on the sample provides contrast in the image to enable auto-focusing without the need to observe contrast over an area of the sample. A method of scanning the surface of a sample is also described, in which a topographical map of the sample is built in a pre-scan with an objective lens having a long working distance. This enables selection of an objective with a shorter working distance for a subsequent scan.

公开(公告)号：US20180252643A1

公开(公告)日：2018-09-06

申请号：US15912919

申请日：2018-03-06

Applicant: RENISHAW PLC

Inventor： Robert James Brown ,  Ruth Alice Lawson

IPC: G01N21/63 ,  G01N21/65 ,  G02B7/09 ,  G02B7/34

CPC classification number: G01N21/63 ,  G01N21/64 ,  G01N21/65 ,  G01N2201/06113 ,  G01N2201/068 ,  G02B7/09 ,  G02B7/34

Abstract: An auto-focus system suitable for a spectroscopy system uses the same illumination beam as the exciting light for spectroscopy. This is focused to a spot or line focus on the sample. An image of the spot or line focus is directed to a detector via one or more pupils located eccentrically of the optical axis, so that the focus condition is indicated by displacement of the image on the detector. The spot or line focus on the sample provides contrast in the image to enable auto-focusing without the need to observe contrast over an area of the sample. A method of scanning the surface of a sample is also described, in which a topographical map of the sample is built in a pre-scan with an objective lens having a long working distance. This enables selection of an objective with a shorter working distance for a subsequent scan.