公开(公告)号：US3672327A

公开(公告)日：1972-06-27

申请号：US3672327D

申请日：1966-10-31

Applicant: REPUBLIC STEEL CORP

Inventor： ROBLIN JOHN M ,  COLE FRANK J ,  REED WILLIAM A

IPC: C23C14/24 ,  C23C13/12

CPC classification number: C23C14/243

Abstract: Vaporizing apparatus and method for the vaporization of metal for vacuum deposition. A relatively thin shell of liquid metal to be vaporized is provided such as through inner and outer concentric vessels which communicate with each other. The thin shell of liquid is heated and boils and evaporates to provide metal for vaporization. The thin shell of liquid is generally formed within the space between the inner and outer concentric vessels. The space within the inner vessel contains liquid which is typically molten but substantially non-boiling. The boiling shell of liquid fills the space between the inner and outer containers so as to provide substantially constant volume of metal for vaporization. Baffle means are provided for removing droplets of liquid normally from within the vapor.

公开(公告)号：US3146183A

公开(公告)日：1964-08-25

申请号：US11266961

申请日：1961-05-25

Applicant: REPUBLIC STEEL CORP

Inventor： REED WILLIAM A ,  ROBLIN JOHN M

IPC: C10B57/04 ,  C10B57/06

CPC classification number: C10B57/04 ,  C10B57/06

公开(公告)号：US3690638A

公开(公告)日：1972-09-12

申请号：US3690638D

申请日：1970-05-15

Applicant: REPUBLIC STEEL CORP

Inventor： ROBLIN JOHN M ,  COLE FRANK J ,  REED WILLIAM A

IPC: C23C14/24 ,  C21C7/00

CPC classification number: C23C14/24

Abstract: Apparatus and method for vacuum vaporization of molten metal without entrainment of liquid droplets includes charging a pool of molten metal into a first cylinder member which has its central axis disposed horizontally and has at least one passage therethrough. A second cylinder member, also having its central axis disposed horizontally, encloses the first cylinder member so as to receive molten metal through the passage. A thin semicylindrical shell of fluid metal is thus formed between the cylinder members. Heating the thin shell generates metal vapor. The metal vapor is passed through a tortuous path to remove any liquid droplets, and is discharged from an outlet nozzle for deposition upon a substrate. In a modification the molten metal is contained in the lower portion of an evaporator member. A shelf with a passage therethrough divides the evaporator member horizontally while allowing generated metal vapor to pass to the upper portion of the evaporator member. There the vapor is passed through a tortuous path to remove any liquid droplets, thence proceeding to an outlet nozzle for deposition upon a substrate.

Abstract translation: 熔融金属真空汽化而不夹带液滴的装置和方法包括将熔融金属池装入第一圆筒件中，第一圆筒件的中心轴线水平设置并具有穿过其中的至少一个通道。 也具有水平设置的中心轴的第二圆柱体构件封闭第一圆柱体构件，以便通过通道接收熔融金属。 因此，在气缸构件之间形成薄的液体金属半圆柱形外壳。 加热薄壳会产生金属蒸汽。 金属蒸汽通过曲折的路径以除去任何液滴，并从出口喷嘴排出以沉积在基底上。