Abstract:
Vaporizing apparatus and method for the vaporization of metal for vacuum deposition. A relatively thin shell of liquid metal to be vaporized is provided such as through inner and outer concentric vessels which communicate with each other. The thin shell of liquid is heated and boils and evaporates to provide metal for vaporization. The thin shell of liquid is generally formed within the space between the inner and outer concentric vessels. The space within the inner vessel contains liquid which is typically molten but substantially non-boiling. The boiling shell of liquid fills the space between the inner and outer containers so as to provide substantially constant volume of metal for vaporization. Baffle means are provided for removing droplets of liquid normally from within the vapor.
Abstract:
Apparatus and method for vacuum vaporization of molten metal without entrainment of liquid droplets includes charging a pool of molten metal into a first cylinder member which has its central axis disposed horizontally and has at least one passage therethrough. A second cylinder member, also having its central axis disposed horizontally, encloses the first cylinder member so as to receive molten metal through the passage. A thin semicylindrical shell of fluid metal is thus formed between the cylinder members. Heating the thin shell generates metal vapor. The metal vapor is passed through a tortuous path to remove any liquid droplets, and is discharged from an outlet nozzle for deposition upon a substrate. In a modification the molten metal is contained in the lower portion of an evaporator member. A shelf with a passage therethrough divides the evaporator member horizontally while allowing generated metal vapor to pass to the upper portion of the evaporator member. There the vapor is passed through a tortuous path to remove any liquid droplets, thence proceeding to an outlet nozzle for deposition upon a substrate.
Abstract:
Apparatus and method for vaporizing molten metal without entrainment of liquid droplets includes charging a pool of molten metal into a chamber in which there is a block having a plurality of passages. A finger is disposed in each passage of the block, a space being left between the inner surface of the passage and the outer surface of the finger to create a shell of fluid metal within the passage. Heating the shells of fluid metal generates metal vapor. The metal vapor is passed through a tortuous path and then directed by a nozzle toward a moving substrate to be coated.