-
公开(公告)号：US20150253256A1
公开(公告)日：2015-09-10
申请号：US14432045
申请日：2013-09-27
Applicant: RUDOLPH TECHNOLOGIES, INC.
Inventor： Wei Zhou
CPC classification number: G01N21/8806 , G01B11/02 , G01B11/06 , G01N21/9501 , G01N21/95607 , G01N2021/95615 , G01N2201/02 , G01N2201/062 , G01N2201/10
Abstract: An inspection system is disclosed. An optical assembly establishes an optical path between a light source and a detector. The optical assembly has a relatively large amount of longitudinal chromatic aberration, so that light at a first wavelength focuses on one region of a substrate in the optical path, while light at a second wavelength simultaneously focuses on another region of the substrate. The system can operate in a calibration mode to determine one or more wavelengths of light corresponding to regions of interest in the substrate and in an imaging mode to image regions of interest in the substrate.
Abstract translation: 公开了一种检查系统。 光学组件在光源和检测器之间建立光路。 光学组件具有相对大量的纵向色差，使得第一波长的光聚焦在光路中的衬底的一个区域上，而第二波长的光同时聚焦在衬底的另一区域上。 该系统可以在校准模式下操作以确定对应于衬底中的感兴趣区域的一个或多个波长的光，并且以成像模式来对基底中的感兴趣的区域进行成像。
-
公开(公告)号：US09664625B2
公开(公告)日：2017-05-30
申请号：US14432045
申请日：2013-09-27
Applicant: RUDOLPH TECHNOLOGIES, INC.
Inventor： Wei Zhou
CPC classification number: G01N21/8806 , G01B11/02 , G01B11/06 , G01N21/9501 , G01N21/95607 , G01N2021/95615 , G01N2201/02 , G01N2201/062 , G01N2201/10
Abstract: An inspection system is disclosed. An optical assembly establishes an optical path between a light source and a detector. The optical assembly has a relatively large amount of longitudinal chromatic aberration, so that light at a first wavelength focuses on one region of a substrate in the optical path, while light at a second wavelength simultaneously focuses on another region of the substrate. The system can operate in a calibration mode to determine one or more wavelengths of light corresponding to regions of interest in the substrate and in an imaging mode to image regions of interest in the substrate.
-
Search Results
2
records
(took 0.012 seconds)
