公开(公告)号：US20150232331A1

公开(公告)日：2015-08-20

申请号：US14624130

申请日：2015-02-17

Applicant: Robert Bosch GmbH

Inventor： Axel GROSSE ,  Heiko STAHL

IPC: B81C1/00 ,  B81B7/00

CPC classification number: B81C1/00595 ,  B81B7/0077 ,  B81B2203/06 ,  B81B2207/07 ,  B81C1/00571 ,  B81C2201/0132 ,  B81C2201/053

Abstract: A layer structure for a micromechanical component, having: a first layer, which is usable both for an electrical wiring of the component and as electrode of the component; and a second layer which is resistant to oxide etching and is disposed below the first layer, the second layer being formed essentially in one plane.

Abstract translation: 一种用于微机械部件的层结构，具有：第一层，其可用于部件的电线和部件的电极; 以及耐氧化物蚀刻的第二层，并且设置在第一层的下方，第二层基本上形成在一个平面中。